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Tunable wavelength laser surface profilometry through tilted interference
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DOI：10.1016/j.measurement.2024.115838.png)
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Abstract
En 中文
Frequency-tunable lasers allow the removal of phase ambiguities in interferometric profilometry through the synthetic wavelength longer than height variations in the sample. The subsequent measurements lowering synthetic wavelengths and updating phase difference values improves the measurement. The surface profilometry on samples with tilted interference can lead to an initial synthetic phase map, though locally unambiguous, getting globally wrapped whose unwrapping can be difficult in the presence of noise. Starting with the synthetic phase map that is locally unambiguous but globally wrapped can still update the phase values through a recursive algorithm. The artefact of 2 pi jumps in the initial wrapped synthetic phase just gets carried forward which can be easily removed from the final phase map obtained with the shortest possible synthetic wavelength. Choosing a point on the sample surface as the point of comparison, the proposed interferometry scheme can be made immune to surrounding vibrations while tuning wavelengths.
Keywords:
Tunable wavelength laser
Synthetic wavelength
Point of comparison
Recursive algorithm
Phase unwrapping
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