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Visualized Atomic-Scale Manufacturing Using Transmission Electron Microscope
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DOI：10.1002/adfm.202526864.png)
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Abstract
En 中文
The relentless pursuit of device miniaturization and enhanced performance has driven manufacturing to its ultimate frontier-atomic-scale manufacturing. Despite recent advances, atomic-scale manufacturing as a whole remains in its infancy, largely constrained by the absence of direct visualization capabilities and a limited understanding of the underlying mechanisms. In situ transmission electron microscopy (TEM), with its exceptional spatiotemporal resolution and ability to integrate external fields, has emerged as a powerful platform that enables simultaneous fabrication and real-time observation. This review summarizes recent progress in visualized atomic-scale manufacturing using in situ TEM, with particular emphasis on processes mediated by electron beam irradiation, thermal excitation, and electrical bias under different environments. First, how an atomic foundry can be established inside the microscope through the application of external fields is examined. Subsequently, advances in visualized fabrication enabled by electron-beam engineering and external-field control are reviewed. Finally, key challenges and future perspectives are discussed, including the need for improved precision, higher throughput, and closer relevance to practical manufacturing conditions. Overall, this review underscores the pivotal role of in situ TEM in advancing the understanding and control of atomic-scale manufacturing, offering insights into precise atomic manipulation and pathways toward practical implementation.
Keywords:
atomic-scale manufacturing
dynamical visualization
electron beam machining
in situ transmission electron microscopy
process mechanism
Journal
IF:
19
Papers:
3.5W
Citations:
32.1W
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