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Visualizing nanometric structures with sub-millimeter waves
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DOI：10.1038/s41467-021-27264-x.png)
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Abstract
En 中文
The authors demonstrate a far-field approach for height profile measurements with sub-millimetre waves. By evaluating Fabry-Perot oscillations within surface-structured samples, combined with a Hilbert-transform approach, they visualize structures with a height of 49 nm, with 31 nm precision. The resolution along the propagation direction of far field imagers can be much smaller than the wavelength by exploiting coherent interference phenomena. We demonstrate a height profile precision as low as 31 nm using wavelengths between 0.375 mm and 0.5 mm (corresponding to 0.6 THz-0.8 THz) by evaluating the Fabry-Perot oscillations within surface-structured samples. We prove the extreme precision by visualizing structures with a height of only 49 nm, corresponding to 1:7500 to 1:10000 vacuum wavelengths, a height difference usually only accessible to near field measurement techniques at this wavelength range. At the same time, the approach can determine thicknesses in the centimeter range, surpassing the dynamic range of any near field measurement system by orders of magnitude. The measurement technique combined with a Hilbert-transform approach yields the (optical) thickness extracted from the relative phase without any extraordinary wavelength stabilization.
Keywords:
1550 NM
RESOLUTION
SYSTEM
RANGE
OCT
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