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Wavefront sensing and optical surface measurement method based on reference light modulation
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DOI：10.1016/j.optlaseng.2024.108659.png)
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Abstract
En 中文
This paper proposes a reflection-type surface coherent interferometric modulation imaging (R-CIMI) method based on reference light modulation, leveraging the interference light path generated by the reflected beam of the modulator and the target surface. Furthermore, we present a mask optimization strategy to enhance the similarity of diffraction pattern structures, as well as an automatic positioning approach based on optical field estimation. Owing to the anti-disturbance properties of coherent diffraction imaging, R-CIMI is less susceptible to environmental disturbances than conventional interference techniques. Simulations and experiments demonstrate that the proposed method is comparable to conventional interference methods in terms of measurement accuracy.
Keywords:
Wavefront Sensing
Phase retrieval
phase modulation
Coherent diffraction imaging
Interferometry
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