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WO3 processed by direct laser interference patterning for NO2 detection
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DOI：10.1016/j.snb.2019.127226.png)
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Abstract
En 中文
In this paper two kind of sensors based on WO3 sputtered by magnetron sputtering and annealed at 600 degrees C have been studied. The first kind was processed by two-dimensional direct laser interfering patterning (DLIP) and the second one without any additional treatment. Morphological and structural characterization have shown a hole structure in a periodic line-pattern for the DLIP-processed sensors and a flat surface for the only-annealed sensors, both with a tetragonal WO3 phase. TOF-SIMS analysis has revealed that the first WO3 layers are reduced for both samples, which could improve sensing performance. Promising response enhancement of DLIP-processed sensors has been observed for low concentrations of NO2 (from 0.5 ppm to 5 ppm) at 200 degrees C, lowering the limit of detection (LOD) to 10 ppb, half of the LOD of the only-annealed sensors (20 ppb). Cross sensitivity to CO and HCHO have been investigated and the sensing mechanisms discussed.
Keywords:
WO3
DLIP
Tetragonal phase
TOF-SIMS
NO2
Arrhenius
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