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Zero-power magnetometers with remote optical interrogation

delete2024-10-22
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PRE
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D
Daniel J. Vasquez
J
Jack W. Judy
DOI：10.1109/MEMS.2004.1290534delete
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Abstract

Abstract

En 中文
A magnetic-field-sensing system that consists of a miniature zero-power magnetometer, an integrated micromachined corner-cube reflector (CCR), commercially available diode laser, and a photo-detector array, has been designed, fabricated, assembled, and tested. The sensor node occupies a volume of only 1.5 mm(3) and can detect a magnetic field between 0 to 6 kA/m. The primary application of this technology is in wireless sensing systems that must operate continuously without providing or maintaining the sensor-node energy (e.g., replacing batteries or scavenging energy) or in extremely harsh environments.
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Journal

M
MEMS and IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
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