Not logged in
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
SaveDeep-reactive ion etching of silicon nanowire arrays at cryogenic temperatures
Xu, Jiushuai; Refino, Andam Deatama; Delvallee, Alexandra; Seibert, Sebastian; Schwalb, Christian; Hansen, Poul Erik; Foldyna, Martin; Siaudinyte, Lauryna; Hamdana, Gerry; Wasisto, Hutomo Suryo; Kottmeier, Jonathan; Dietzel, Andreas; Weimann, Thomas; Pruessing, Jan Kristen; Bracht, Hartmut; Peiner, Erwin
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save