Not logged in.png)
Share.png)
SaveDigital Etching of Molybdenum Interconnects Using Plasma Oxidation
Erofeev, Ivan; Hartanto, Antony Winata; Khan, Muhaimin Mareum; Deng, Kerong; Kumar, Krishna; Aabdin, Zainul; Tjiu, Weng Weei; Zhang, Mingsheng; Pacco, Antoine; Philipsen, Harold; Chowdhuri, Angshuman Ray; Huynh, Han Vinh; Holsteyns, Frank; Mirsaidov, Utkur Share Save Nanoscale Wet Etching of Molybdenum Interconnects with Organic SolutionsDeng, Kerong; Erofeev, Ivan; Chowdhuri, Angshuman Ray; Philipsen, Harold; Aabdin, Zainul; Hartanto, Antony Winata; Tjiu, Weng Weei; Zhang, Mingsheng; Fernando, Devshan; Saidov, Khakimjon; Kumar, Krishna; Pacco, Antoine; Holsteyns, Frank; Huynh, Han Vinh; Mirsaidov, Utkur Share Save Controlling the Wet-Etch Directionality in Nanostructured SiliconAabdin, Zainul; Ghosh, Tanmay; Pacco, Antoine; Raj, Sanoj; Do, Hue Thi Bich; Saidov, Khakimjon; Tjiu, Weng Weei; Anand, Utkarsh; Kral, Petr; Holsteyns, Frank; Bosman, Michel; Mirsaidov, Utkur Share Save Preventing the Capillary-Induced Collapse of Vertical NanostructuresGhosh, Tanmay; Fritz, Eva-Corinna; Balakrishnan, Deepan; Zhang, Ziyu; Vrancken, Nandi; Anand, Utkarsh; Zhang, Hong; Loh, N. Duane; Xu, XiuMei; Holsteyns, Frank; Nijhuis, Christian A.; Mirsaidov, Utkur Share Save Share Save Photoanodic oxidation of InP in acid solution and its surface chemistry: On the interplay of photons, protons and hydrodynamicsvan Dorp, Dennis H.; Vanheusden, Genis; Paulussen, Kris; Hassan, Ibrahim; Van Wonterghem, Simon; Abrenica, Graniel H.; Dara, Praveen; Meersschaut, Johan; Conard, Thierry; Holsteyns, Frank; Kelly, John J. Share Save Share Save Share Save Share Save In-situ ATR-FTIR for dynamic analysis of superhydrophobic breakdown on nanostructured silicon surfacesVrancken, Nandi; Li, Jiaqi; Sergeant, Stefanie; Vereecke, Guy; Doumen, Geert; Holsteyns, Frank; Chen, Chang; Terryn, Herman; De Gendt, Stefan; Xu, XiuMei Share Save Share Save Share Save Share Save Full wetting of plasmonic nanopores through two-component dropletsChen, Chang; Xu, XiuMei; Li, Yi; Jans, Hilde; Neutens, Pieter; Kerman, Sarp; Vereecke, Guy; Holsteyns, Frank; Maes, Guido; Lagae, Liesbet; Stakenborg, Tim; van Dorpe, Pol Share Save Capturing Wetting States in Nanopatterned SiliconXu, XiuMei; Vereecke, Guy; Chen, Chang; Pourtois, Geoffrey; Armini, Silvia; Verellen, Niels; Tsai, Wei-Kang; Kim, Dong-Wook; Lee, Eunsongyi; Lin, Chang-You; Van Dorpe, Pol; Struyf, Herbert; Holsteyns, Frank; Moshchalkov, Victor; Indekeu, Joseph; De Gendt, Stefan Share Save Share Save Share Save Share Save A new technique to fabricate ultra-shallow-junctions, combining in situ vapour HCl etching and in situ doped epitaxial SiGe re-growthLoo, R; Caymax, M; Meunier-Beillard, P; Peytier, I; Holsteyns, F; Kubicek, S; Verheyen, P; Lindsay, R; Richard, O Share Save 
.png){kind=icon}
.png){kind=icon}
.png){kind=icon}
.png){kind=icon}
.png){kind=icon}