Not logged inDigital Etching of Molybdenum Interconnects Using Plasma Oxidation
Erofeev, Ivan; Hartanto, Antony Winata; Khan, Muhaimin Mareum; Deng, Kerong; Kumar, Krishna; Aabdin, Zainul; Tjiu, Weng Weei; Zhang, Mingsheng; Pacco, Antoine; Philipsen, Harold; Chowdhuri, Angshuman Ray; Huynh, Han Vinh; Holsteyns, Frank; Mirsaidov, Utkur .png)
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SaveNanoscale Wet Etching of Molybdenum Interconnects with Organic SolutionsDeng, Kerong; Erofeev, Ivan; Chowdhuri, Angshuman Ray; Philipsen, Harold; Aabdin, Zainul; Hartanto, Antony Winata; Tjiu, Weng Weei; Zhang, Mingsheng; Fernando, Devshan; Saidov, Khakimjon; Kumar, Krishna; Pacco, Antoine; Holsteyns, Frank; Huynh, Han Vinh; Mirsaidov, Utkur Share Save Controlled Stepwise Wet Etching of Polycrystalline Mo NanowiresSaidov, Khakimjon; Erofeev, Ivan; Aabdin, Zainul; Pacco, Antoine; Philipsen, Harold; Hartanto, Antony Winata; Chen, Yifan; Yan, Hongwei; Tjiu, Weng Weei; Holsteyns, Frank; Mirsaidov, Utkur Share Save Share Save 
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