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Development of controlled nanosphere lithography technology Osipov, Artem A. A.; Gagaeva, Alina E. E.; Speshilova, Anastasiya B. B.; Endiiarova, Ekaterina V. V.; Bespalova, Polina G. G.; Osipov, Armenak A. A.; Belyanov, Ilya A. A.; Tyurikov, Kirill S. S.; Tyurikova, Irina A. A.; Alexandrov, Sergey E. E. Share Save
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OES diagnostics as a universal technique to control the Si etching structures profile in ICP Osipov, Artem A.; Iankevich, Gleb A.; Speshilova, Anastasia B.; Gagaeva, Alina E.; Osipov, Armenak A.; Enns, Yakov B.; Kazakin, Alexey N.; Endiiarova, Ekaterina, V; Belyanov, Ilya A.; Ivanov, Viktor I.; Alexandrov, Sergey E. Share Save
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Silicon carbide dry etching technique for pressure sensors design Osipov, Artem A.; Iankevich, Gleb A.; Osipov, Armenak A.; Speshilova, Anastasiya B.; Karakchieva, Anna A.; Endiiarova, Ekaterina, V; Levina, Svetlana N.; Karakchiev, Sergey, V; Alexandrov, Sergey E. Share Save
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High-temperature etching of SiC in SF6/O2 inductively coupled plasma Osipov, Artem A.; Iankevich, Gleb A.; Speshilova, Anastasia B.; Osipov, Armenak A.; Endiiarova, Ekaterina, V; Berezenko, Vladimir, I; Tyurikova, Irina A.; Tyurikov, Kirill S.; Alexandrov, Sergey E. Share Save
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