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SaveHigh-purity and very low oxygen content MgF2 thin films by newly designed plasma-enhanced atomic layer deposition
Zhang, Zhi-Xuan; Lin, Xiao; Zhang, Jing; Zhu, Wen-Xuan; Gao, Peng; Qiu, Yu; Hsu, Chia-Hsun; Lin, Zhi-Xian; Lien, Shui-Yang; Wang, Chen; Wu, Wan-Yu; Wuu, Dong-Sing
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