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Tadatomo Suga

meisei university

51H-index
869Paper Count
1.1WCitation Count
Published Papers 109
Publication Date
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Ammonia vapor-assisted plasma activation and mechanism study for high-strength direct wafer bonding of silicon oxide
err2026-01-30
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PREAI
errXiaohui Yuan; Shijiao Xu; Linjie Liu; Xiangyu Zhou; Kaimeng Liu; Yujie Han; Tadatomo Suga; Chenxi Wang
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Hydroxide-catalyzed bonding of sapphire and quartz glass enabled by plasma activation
err2026-01-15
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PREAI
errErni Shao; Han Yan; Yan Ma; Yufei Bai; Yanhong Tian; Tadatomo Suga; Chenxi Wang
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Low-Temperature In Situ Bonding with Ion-Free Neutral Species and Ammonia-Enhanced Activation for Microfluidic Chip Architecture
err2025-08-01
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PREAI
errXiaohui Yuan; Linjie Liu; Fanfan Niu; Xiaoyun Qi; Xiangyu Zhou; Guining Yu; Tadatomo Suga; Chenxi Wang
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Enhanced Cu-Cu bonding for ultrahigh-density interconnection: Co passivation bonding with non-oxidation interfaces
err2025-03-01
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PREAI
errQi, Xiaoyun; Yan, Han; Yuan, Xiaohui; Bai, Yufei; Suga, Tadatomo; Wang, Chenxi
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From surface activation to microfluidic heat pipes: An innovative in-situ wafer level heterogenous bonding method
err2024-10-01
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PREAI
errYuan, Xiaohui; Liu, Linjie; Niu, Fanfan; Qi, Xiaoyun; An, Baitao; Suga, Tadatomo; Wang, Chenxi
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Wafer-level InP-Si covalent bonding and defect-free heterointerface for photonic quantum systems
err2024-10-01
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PREAI
errKang, Qiushi; Niu, Fanfan; Li, Ge; Liu, Kaimeng; Suga, Tadatomo; Wang, Chenxi
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Elucidating the formation mechanisms of the parasitic channel with buffer-free GaN/Si hetero-bonding structures
err2024-05-09
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PREAI
errShi, Hangning; Ding, Jiaxin; Qin, Qingcheng; Yi, Ailun; Sun, Jialiang; Suga, Tadatomo; Yi, Juemin; Wang, Jianfeng; Xu, Ke; Zhou, Min; Huang, Kai; You, Tiangui; Ou, Xin
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Low-temperature Cu/SiO2 hybrid bonding based on Ar/H2 plasma and citric acid cooperative activation for multi-functional chip integration
err2024-03-01
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PREAI
errNiu, Fanfan; Wang, Xiaobing; Yang, Shuhan; Xu, Shijiao; Zhang, Yuyang; Suga, Tadatomo; Wang, Chenxi
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Thermal Transport Properties of β-Ga2O3 Thin Films on Si and SiC Substrates Fabricated by an Ion-Cutting Process
err2024-02-27
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PREAI
errXu, Wenhui; Zhao, Tiancheng; Zhang, Lianghui; Liu, Kang; Sun, Huarui; Qu, Zhenyu; You, Tiangui; Yi, Ailun; Huang, Kai; Han, Genquan; Mu, Fengwen; Suga, Tadatomo; Ou, Xin; Hao, Yue
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Room temperature wafer bonding through conversion of polysilazane into SiO2
err2024-01-13
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errOAAI
errTakeuchi, Kai; Suga, Tadatomo; Higurashi, Eiji
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Defect evolution in GaN thin film heterogeneously integrated with CMOS-compatible Si(100) substrate by ion-cutting technology
err2023-10-20
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PREAI
errShi, Hangning; Yi, Ailun; Ding, Jiaxin; Liu, Xudong; Qin, Qingcheng; Yi, Juemin; Hu, Junjie; Wang, Miao; Cai, Demin; Wang, Jianfeng; Xu, Ke; Mu, Fengwen; Suga, Tadatomo; Heller, Rene; Wang, Mao; Zhou, Shengqiang; Xu, Wenhui; Huang, Kai; You, Tiangui; Ou, Xin
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Cu-Cu Thermocompression Bonding with a Self-Assembled Monolayer as Oxidation Protection for 3D/2.5D System Integration
err2023-06-30
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errOAAI
errLykova, Maria; Panchenko, Iuliana; Schneider-Ramelow, Martin; Suga, Tadatomo; Mu, Fengwen; Buschbeck, Roy
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Room temperature bonding of Au assisted by self-assembled monolayer
err2023-02-03
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PREAI
errTakeuchi, Kai; Wang, Junsha; Kim, Beomjoon; Suga, Tadatomo; Higurashi, Eiji
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ReS2 on GaN Photodetector Using H+ Ion-Cut Technology
err2022-12-20
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errOAAI
errLiu, Xinke; Zhou, Jie; Luo, Jiangliu; Shi, Hangning; You, Tiangui; Ou, Xin; Botcha, Venkatadivakar; Mu, Fengwen; Suga, Tadatomo; Wang, Xinzhong; Huang, Shuangwu
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A novel strategy for GaN-on-diamond device with a high thermal boundary conductance
err2022-06-01
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errOAAI
errMu, Fengwen; Xu, Bin; Wang, Xinhua; Gao, Runhua; Huang, Sen; Wei, Ke; Takeuchi, Kai; Chen, Xiaojuan; Yin, Haibo; Wang, Dahai; Yu, Jiahan; Suga, Tadatomo; Shiomi, Junichiro; Liu, Xinyu
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