Not logged in
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
SaveEffects of organic compounds rich in phosphate functional groups as multifunctional inhibitors on copper film chemical-mechanical polishing properties: Combined experiment and theoretical calculation
Dong, Changxin; Niu, Xinhuan; He, Chao; Li, Xinjie; Wu, Zheng; Li, Jiahui; Hu, Bin; Shi, Yunhui; Cheng, Jiabao; Luan, Xiaodong
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save
Share
Save