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Miklós Serényi

thin film physics department

12H-index
80Paper Count
566Citation Count
Published Papers 26
Publication Date
Dramatic interference of Au TEM grid with model and supported MoNi/MgO catalysts during high temperature reduction and methane decomposition
err2025-10-04
err0
PREAI
errAnita Horváth; Miklós Németh; Andrea Beck; Dániel Olasz; Miklós Serényi; György Sáfrán
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A Study of HiPIMS Process Characteristics in SiO2 Deposition
err2025-10-01
err0
errOAAI
errMarcell Gajdics; Dániel Olasz; György Sáfrán; Miklós Serényi
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Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases
err2023-04-10
err1
errOAAI
errSafran, Gyoergy; Petrik, Peter; Szasz, Noemi; Olasz, Daniel; Chinh, Nguyen Quang; Serenyi, Miklos
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Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers under Varying Reactive Gas Conditions
err2022-09-12
err7
errOAAI
errHegedus, Nikolett; Balazsi, Csaba; Kolonits, Tamas; Olasz, Daniel; Safran, Gyorgy; Serenyi, Miklos; Balazsi, Katalin
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Interpretation of hydrogen incorporation into radio frequency sputtered amorphous silicon based on Berg modelling
errVACUUM
IF3.9
err2022-08-01
err1
errOAAI
errHegedues, Nikolett; Lovics, Riku; Serenya, Miklos; Zolnai, Zsolt; Petrik, Peter; Balazsi, Csaba; Balazsi, Katalin
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Concordant element of the oxidation kinetics-Interpretation of ellipsometric measurements on Zr
err2022-01-01
err3
errOAAI
errRomanenko, Alekszej; Agocs, Emil; Hozer, Zoltan; Petrik, Peter; Serenyi, Miklos
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Smart gas dosage by a peristaltic pump for reactive RF sputtering of composition spread combinatorial hafnium-oxy-nitride layers
errVACUUM
IF3.9
err2020-12-01
err4
errOAAI
errSafran, Gyorgy; Szasz, Noemi; Dobrik, Gergely; Kalas, Benjamin; Serenyi, Miklos
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Micro-combinatorial sampling of the optical properties of hydrogenated amorphous Si 1-x Ge x for the entire range of compositions towards a database for optoelectronics
err2020-11-06
err13
errOAAI
errKalas, Benjamin; Zolnai, Zsolt; Safran, Gyoergy; Serenyi, Miklos; Agocs, Emil; Lohner, Tivadar; Nemeth, Attila; Khanh, Nguyen Quoc; Fried, Miklos; Petrik, Peter
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CoPt/TiN films nanopatterned by RF plasma etching towards dot-patterned magnetic media
err2018-03-01
err7
errOAAI
errSzivos, Janos; Pothorszky, Szilard; Soltys, Jan; Serenyi, Miklos; An, Hongyu; Gao, Tenghua; Deak, Andras; Shi, Ji; Safran, Gyoergy
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Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
err2018-02-01
err11
errOAAI
errGurban, S.; Petrik, P.; Serenyi, M.; Sulyok, A.; Menyhard, M.; Baradacs, E.; Parditka, B.; Cserhati, C.; Langer, G. A.; Erdelyi, Z.
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Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide
err2017-11-01
err1
PREAI
errLohner, Tivadar; Serenyi, Miklos; Szilagyi, Edit; Zolnai, Zsolt; Czigany, Zsolt; Nguyen Quoc Khanh; Petrik, Peter; Fried, Miklos
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A technique for nanopatterning diverse materials
err2017-03-01
err2
PREAI
errSzivos, Janos; Serenyi, Miklos; Pothorszky, Szilard; Deak, Andras; Vertesy, Gabor; Safran, Gyoergy
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Effect of heat treatments on the properties of hydrogenated amorphous silicon for PV and PVT applications
err2015-09-01
err11
PREAI
errFrigeri, C.; Serenyi, M.; Szekrenyes, Zs.; Kamaras, K.; Csik, A.; Khanh, N. Q.
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Nanopattern formation in UV laser treated a-AlOx, and nc-Al/AlOx layers
errVACUUM
IF3.9
err2014-11-01
err4
errOAAI
errSzivos, Janos; Serenyi, M.; Gergely-Fueloep, E.; Lohner, T.; Safran, G.
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Evolution of the structure and hydrogen bonding configuration in annealed hydrogenated a-Si/a-Ge multilayers and layers
err2013-03-01
err3
PREAI
errFrigeri, C.; Serenyi, M.; Csik, A.; Szekrenyes, Zs.; Kamaras, K.; Nasi, L.; Khanh, N. Q.
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On the formation of blisters in annealed hydrogenated a-Si layers
err2013-02-15
err7
errOAAI
errSerenyi, Miklos; Frigeri, Cesare; Szekrenyes, Zsolt; Kamaras, Katalin; Nasi, Lucia; Csik, Attila; Nguyen Quoc Khanh
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