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Julian Schulze

ruhr university bochum

54H-index
487Paper Count
9.0KCitation Count
Published Papers 181
Publication Date
Magnetically induced formation and disruption of striations in capacitively coupled radio-frequency CF4 plasmas
err2026-04-29
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errOAAI
errLi Wang; Aranka Derzsi; Peter Hartmann; Zoltán Donkó; Maximilian Ryppa; Constantin Neuroth; Florian Beckfeld; Wan Dong; Yuan-Hong Song; Julian Schulze
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Atomic layer etching of sputter-deposited AlN thin films in radiofrequency Cl2–Ar plasmas
err2026-04-09
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errOAAI
errIurii Nesterenko; Joaquín Miranda-Mena; Benjamin Kalas; Dmytro Solonenko; Jon Farr; Steffen Harzenetter; Thang Duy Dao; Julian Schulze; Nikolai Andrianov
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Effects of RF bias phase on plasma characteristics in an inductively coupled plasma
err2026-02-24
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PREAI
errZhaoyu Chen; Zili Chen; Yu Wang; Hongyu Wang; Wei Jiang; Yonghua Ding; Donghui Xia; Julian Schulze; Xixuan Chen; Ya Zhang
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Computational investigations of impedance matching for pulsed capacitively coupled plasmas
err2026-02-10
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PREAI
errShimin Yu; Zili Chen; Yu Wang; Zhipeng Chen; Zhijiang Wang; Wei Jiang; Ya Zhang; Julian Schulze
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Similarity scaling for low-pressure capacitive radio-frequency CF4 plasmas across operation modes
err2026-02-09
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PREAI
errZhou, Zhenhua; Wang, Xiaokun; Li, Hanyang; Schulze, Julian; Hartmann, Peter; Donko, Zoltan; Liu, Yongxin; Fu, Yangyang
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Ion-ion oscillation and periodic emission pattern in electronegative capacitively coupled radio frequency plasmas
err2026-02-01
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PREAI
errWang, Tianhong; Rauf, Shahid; Friedrichs, Niklas; Korolov, Ihor; Kenney, Jason; Schulze, Julian
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Effects of inductive and capacitive bias power on plasma parameters in inductively coupled radio frequency discharges
err2026-01-13
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PREAI
errXiandi Li; Zhaoyu Chen; Zili Chen; Li Wang; Yu Wang; Zhipeng Chen; Hongyu Wang; Wei Jiang; Julian Schulze; Ya Zhang
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Simulation study of mode transitions induced by external control parameters in capacitively coupled oxygen discharges
err2025-09-25
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PREAI
errChong-Biao Tian; Li Wang; Máté Vass; Xiao-Kun Wang; Wan Dong; Yuan-Hong Song; Julian Schulze
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Dynamics of electron power absorption in capacitive radio-frequency CF4 plasmas operating in the striation mode
err2025-08-29
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errOAAI
errZhenhua Zhou; Xiaokun Wang; Hanyang Li; Dong Yang; Wenjin Zhang; Julian Schulze; Peter Hartmann; Zoltán Donkó; Yongxin Liu; Yangyang Fu
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Unified mechanism of sub-mode transitions and bistability induced by electron–sheath interactions in capacitively coupled plasmas
err2025-08-26
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PREAI
errJianxiong Yao; Zeduan Zhang; Quan-Zhi Zhang; Julian Schulze; Yangyang Fu; Kai Zhao; Feng He; Jinsong Miao; Jiting Ouyang; Bocong Zheng
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Multiscale Simulation of Capacitively Coupled Ar/CHF3 Discharges Driven by Sawtooth-Tailored Voltage Waveforms
err2025-04-20
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PREAI
errWan Dong; Liu-Qin Song; Yi-Fan Zhang; Li Wang; Yuan-Hong Song; Julian Schulze
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