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Hoseo University

学者数1.0K
论文数1.2K
被引数5
关联论文 (1179)
发表时间
Ultra-shallow Si junction formation by non-melt laser annealing of ALD B2O3 films通过非熔融激光退火ALD B2O3薄膜制备超浅硅结
err2026-08-22
err0
PREAI
errSeunggyu Na; Sanghun Lee; Inkyu Sohn; Jaehyeok Kim; Sojeong Eom; Jisang Yoo; Jeongwoo Seo; Hyeonwoo Lee; Hyun Jung Lee; Seung-min Chung; Hyungjun Kim
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Plasma-relaxation-assisted atomic layer deposition of ultralow-k amorphous boron nitride with enhanced ambient stability等离子体弛豫辅助原子层沉积法制备具有增强环境稳定性的超低介电常数非晶氮化硼
err2026-07-31
err0
PREAI
errInkyu Sohn; Jeongwoo Seo; Taehoon Kim; Minji Kim; Jisang Yoo; Jaewon Kim; Jae Hong Lee; Woochang Lee; Yoonhoo Ha; Jaehyeok Kim; Chang-Seok Lee; Seung-min Chung; Hyungjun Kim
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