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收藏Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing
Frechilla, Alejandro; Napari, Mari; Strkalj, Nives; Barriuso, Eduardo; Niang, Kham; Hellenbrand, Markus; Strichovanec, Pavel; Simanjuntak, Firman Mangasa; Antorrena, Guillermo; Flewitt, Andrew; Magen, Cesar; de la Fuente, German F.; MacManus-Driscoll, Judith L.; Angurel, Luis Alberto; Pardo, Jose Angel
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