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Hyoungjae Kim

Korea Institute of Industrial Technology

17H指数
79论文数
1.1K被引数
收录论文 10
发表时间
Particle removal behavior of micropatterned pad buffing in post-CMP cleaning微图案垫抛光在CMP后清洗中的粒子去除行为
err2025-06-17
err0
errOAAI
errJung, Hokyoung; Park, Youngwook; Cho, Hanchul; Kim, Doyeon; Lee, Taekyung; Jeong, Haedo; Kim, Hyoungjae
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Ultrahigh Power Output from Triboelectric Nanogenerator Based on Serrated Electrode via Spark Discharge
err2020-10-07
err45
PREAI
errKim, Jihye; Cho, Hanchul; Han, Maeum; Jung, Young; Kwak, Sung Soo; Yoon, Hong-Joon; Park, Byunggeon; Kim, Hyeok; Kim, Hyoungjae; Park, Jinhyoung; Kim, Sang-Woo
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Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping
err2020-08-14
err6
errOAAI
errLee, Taekyung; Jeong, Haedo; Lee, Sangjik; Kim, Doyeon; Kim, Hyoungjae
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A hybrid polysilicon planarization for suppressing dishing defects
err2012-12-01
err1
PREAI
errPark, Sungmin; Yoon, Sang-Hee; Kim, Hyoungjae; Jeong, Haedo
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Effect of mechanical factor in uniformity for electrochemical mechanical planarization
err2010-09-01
err10
PREAI
errJeong, Sukhoon; Bae, Jaehyun; Lee, Hyunseop; Lee, Hojun; Lee, Youngkyun; Park, Boumyoung; Kim, Hyoungjae; Kim, Sungryul; Jeong, Haedo
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Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization
err2010-01-01
err16
PREAI
errJeong, Sukhoon; Lee, Hyunseop; Cho, Hanchul; Lee, Sangjik; Kim, Hyoungjae; Kim, Sungryul; Park, Jaehong; Jeong, Haedo
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Pad roughness variation and its effect on material removal profile in ceria-based CMP slurry
err2008-07-01
err43
PREAI
errPark, Boumyoung; Lee, Hyunseop; Park, Kihyun; Kim, Hyoungjae; Jeong, Haedo
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