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M

M. Rahman

National University of Singapore

28H指数
76论文数
2.6K被引数
收录论文 22
发表时间
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Sub-micron surface patterning by laser irradiation through microlens arrays
err2007-10-01
err26
PREAI
errLim, C. S.; Hong, M. H.; Lin, Y.; Chen, G. X.; Kumar, A. Senthil; Rahman, M.; Tan, L. S.; Fuh, J. Yh.; Lim, G. C.
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Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning
err2006-11-10
err89
PREAI
errLim, C. S.; Hong, M. H.; Lin, Y.; Xie, Q.; Luk'yanchuk, B. S.; Kumar, A. Senthil; Rahman, M.
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A material removal rate model for copper abrasive-free CMP
err2005-01-01
err16
PREAI
errHaque, T; Balakumar, S; Kumar, AS; Rahman, M
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Wear phenomena in abrasive-free copper CMP process
err2005-01-01
err22
PREAI
errBalakumar, S; Haque, T; Kumar, AS; Rahman, M; Kumar, R
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