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Ulrich Schmid

Technische Universitat Wien

28H指数
1.4K论文数
3.3K被引数
收录论文 27
发表时间
Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (YxAl1-xN) Thin Films
err2023-10-02
err5
errOAAI
errPandit, Shardul; Schneider, Michael; Schwarz, Sabine; Schmid, Ulrich
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Advanced mid-infrared plasmonic waveguides for on-chip integrated photonics
err2023-09-27
err5
errOAAI
errDavid, Mauro; Disnan, Davide; Arigliani, Elena; Lardschneider, Anna; Marschick, Georg; Hoang, Hanh T.; Detz, Hermann; Lendl, Bernhard; Schmid, Ulrich; Strasser, Gottfried; Hinkov, Borislav
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Robust Pressure Sensor in SOI Technology with Butterfly Wiring for Airfoil Integration
errSENSORS
IF3.5
err2021-09-13
err4
errOAAI
errHaus, Jan Niklas; Schwerter, Martin; Schneider, Michael; Gading, Marcel; Leester-Schadel, Monika; Schmid, Ulrich; Dietzel, Andreas
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Growth and characterization of low pressure chemical vapor deposited Si on Si-face 4H-SiC
err2021-08-01
err5
errOAAI
errTriendl, F.; Pfusterschmied, G.; Pobegen, G.; Schwarz, S.; Artner, W.; Konrath, J. P.; Schmid, U.
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Wet chemical porosification with phosphate buffer solutions for permittivity reduction of LTCC substrates
err2021-05-01
err5
PREAI
errHajian, Ali; Konegger, Thomas; Bielecki, Konrad; Mieller, Bjoern; Rabe, Torsten; Schwarz, Sabine; Zellner, Christopher; Schmid, Ulrich
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Tailored and deep porosification of LTCC substrates with phosphoric acid
err2019-08-01
err4
errOAAI
errHajian, Ali; Smetaczek, Stefan; Zellner, Christopher; Stoeger-Pollach, Michael; Konegger, Thomas; Limbeck, Andreas; Schmid, Ulrich
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On the porosification of LTCC substrates with sodium hydroxide
err2019-01-01
err9
errOAAI
errHajian, Ali; Mueftueoglu, Doruk; Konegger, Thomas; Schneider, Michael; Schmid, Ulrich
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Editorial for the Special Issue on Piezoelectric MEMS
err2018-05-15
err3
errOAAI
errSchmid, Ulrich; Schneider, Michael
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Porosification behaviour of LTCC substrates with potassium hydroxide
err2018-05-01
err9
errOAAI
errHajian, Ali; Stoeger-Pollach, Michael; Schneider, Michael; Mueftueoglu, Doruk; Crunwell, Frank K.; Schmid, Ulrich
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Metal assisted photochemical etching of 4H silicon carbide
err2017-09-27
err16
errOAAI
errLeitgeb, Markus; Zellner, Christopher; Schneider, Michael; Schwab, Stefan; Hutter, Herbert; Schmid, Ulrich
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Concentration and temperature dependent selectivity of the LTCC porosification process with phosphoric acid
err2017-01-01
err6
PREAI
errSteinhaeusser, Frank; Talai, Armin; Goeltl, Gwen; Steiger-Thirsfeld, Andreas; Bittner, Achim; Weigel, Robert; Koelpin, Alexander; Schmid, Ulrich
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Inductively-coupled plasma-enhanced chemical vapour deposition of hydrogenated amorphous silicon carbide thin films for MEMS
err2016-08-01
err26
PREAI
errFrischmuth, Tobias; Schneider, Michael; Maurer, Daniel; Grille, Thomas; Schmid, Ulrich
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Impact of layer and substrate properties on the surface acoustic wave velocity in scandium doped aluminum nitride based SAW devices on sapphire
err2016-06-06
err26
PREAI
errGillinger, M.; Shaposhnikov, K.; Knobloch, T.; Schneider, M.; Kaltenbacher, M.; Schmid, U.
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Permittivity reduction and surface modification by porosification of LTCC
err2016-05-01
err9
PREAI
errSteinhaeusser, Frank; Talai, Armin; Weigel, Robert; Koelpin, Alexander; Bittner, Achim; Schmid, Ulrich
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Unfaithful Glitch Propagation in Existing Binary Circuit Models
err2016-03-01
err13
errOAAI
errFuegger, Matthias; Nowak, Thomas; Schmid, Ulrich
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High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
err2014-09-30
err106
PREAI
errWang, Wenbo; Mayrhofer, Patrick M.; He, Xingli; Gillinger, Manuel; Ye, Zhi; Wang, Xiaozhi; Bittner, Achim; Schmid, Ulrich; Luo, J. K.
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