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Z

Z. Chen

beijing institute of technology

3H指数
15论文数
66被引数
收录论文 4
发表时间
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Vertical dielectric spacer engineering via nonconformal inductively coupled plasma-enhanced chemical vapor deposition通过非 conformal 电感耦合等离子体增强化学气相沉积进行垂直介电间隔层工程
errMaterials Science in Semiconductor Processing
IF4.6
err2026-05-17
err0
PREAI
errJingjing Zhang; Yingjie Fan; Yilin Zhang; Lihui Yu; Zhuzhuoyue Chen; Shujun Ye
err分享
err收藏
Phosphoric acid wet etching of silicon oxide/silicon nitride stacked nanolayers in limited space硅氧化物/硅氮化物堆叠纳米层在有限空间内的磷酸湿法刻蚀
errMaterials Science in Semiconductor Processing
IF4.6
err2025-10-21
err0
PREAI
errQiutong Zhao; Yingjie Fan; Jingjing Zhang; Lihui Yu; Zhuzhuoyue Chen; Yilin Zhang; Jingquan Guo; Shujun Ye
err分享
err收藏
Automatic GPU memory access optimization for AoSoA-based application in OP2 framework基于AoSoA的应用在OP2框架中的自动GPU内存访问优化
errsupercomputing
IF0
err2025-08-15
err0
PREAI
errTong Lei; Zongjing Chen; Yonggang Che; Chuanfu Xu; Zhe Dai; Jian Zhang
err分享
err收藏
Sub-200-nm-diameter cylindrical silicon nanopillars with high aspect ratio (40:1) fabricated by SF6/C4F8-modulated ICP-RIE通过SF6/C4F8调制的ICP-RIE制备的直径小于200 nm、高宽比为40:1的圆柱形硅纳米柱
errMaterials Science in Semiconductor Processing
IF4.6
err2025-06-29
err0
PREAI
errYiwen Li; Lihui Yu; Yilin Zhang; Qiutong Zhao; Jingquan Guo; Yingjie Fan; Zhuzhuoyue Chen; Jingjing Zhang; Shujun Ye
err分享
err收藏

研究方向

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合作学者
合作期刊
L
Lei Tong
H 指数: 35 · 论文数: 162
Y
Yiwen Li
H 指数: 32 · 论文数: 131
Y
Yilin Zhang
H 指数: 26 · 论文数: 90
S
Shujun Ye
H 指数: 22 · 论文数: 123
Y
Yingjie 英杰 Fan 樊
H 指数: 18 · 论文数: 83
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