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Hideki Takagi

National Institute of Advanced Industrial Science and Technology

33H指数
345论文数
4.3K被引数
收录论文 36
发表时间
Electrical conductance at Ga2O3/Si interfaces fabricated via surface activated bonding通过表面激活键合制备的Ga₂O₃/Si界面的电导率
err2025-10-14
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errOAAI
errMatsumae, Takashi; Kurashima, Yuichi; Nemoto, Ryoichi; Sasaki, Kohei; Suyama, Atsushi; Yokota, Kazuhiro; Takagi, Hideki
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Room temperature bonding of Au plating through surface smoothing using polyimide template stripping使用聚酰亚胺模板剥离通过表面平滑进行Au镀层的室温键合
err2025-03-01
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PREAI
errTakeuchi, Kai; Koseki, Shogo; Thu, Le Hac Huong; Matsumae, Takashi; Takagi, Hideki; Kurashima, Yuichi; Tsuda, Takahiro; Tokuhisa, Tomoaki; Shimizu, Toshikazu; Higurashi, Eiji
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Low-temperature bonding of HCl-dipped Ge substrate with diamond heat-spreader through atomically thin layer
err2025-03-01
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PREAI
errMinowa, Yuki; Matsumae, Takashi; Kurashima, Yuichi; Takagi, Hideki; Hayase, Masanori
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Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source
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IF3.5
err2024-06-20
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errOAAI
errKurashima, Yuichi; Maeda, Atsuhiko; Oshima, Naoto; Motomura, Taisei; Matsumae, Takashi; Watanabe, Mitsuhiro; Takagi, Hideki
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High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps
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IF3.5
err2023-01-16
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errOAAI
errKurashima, Yuichi; Motomura, Taisei; Yanagimachi, Shinya; Matsumae, Takashi; Watanabe, Mitsuhiro; Takagi, Hideki
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Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging
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IF3.5
err2022-10-24
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errOAAI
errMatsumae, Takashi; Kariya, Shingo; Kurashima, Yuichi; Thu, Le Hac Huong; Higurashi, Eiji; Hayase, Masanori; Takagi, Hideki
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An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring
err2022-10-07
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errOAAI
errZhang, Lan; Lu, Jian; Takagi, Hideki; Matsumoto, Sohei; Higurashi, Eiji
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Room temperature bonding of GaN and diamond substrates via atomic layer
err2022-07-01
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PREAI
errMatsumae, Takashi; Kurashima, Yuichi; Takagi, Hideki; Shirayanagi, Yusuke; Hiza, Shuichi; Nishimura, Kunihiko; Higurashi, Eiji
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Bonding formation and gas absorption using Au/Pt/Ti layers for vacuum packaging
err2022-01-17
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errOAAI
errKariya, Shingo; Matsumae, Takashi; Kurashima, Yuichi; Takagi, Hideki; Hayase, Masanori; Higurashi, Eiji
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Low-temperature direct bonding of InP and diamond substrates under atmospheric conditions
err2021-05-27
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errOAAI
errMatsumae, Takashi; Takigawa, Ryo; Kurashima, Yuichi; Takagi, Hideki; Higurashi, Eiji
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Heterogeneous GaN-Si integration via plasma activation direct bonding
err2021-01-01
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PREAI
errMatsumae, Takashi; Mu Fengwen; Fukumoto, Shoya; Hayase, Masanori; Kurashima, Yuichi; Higurashi, Eiji; Takagi, Hideki; Suga, Tadatomo
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Low-temperature direct bonding of diamond (100) substrate on Si wafer under atmospheric conditions
err2021-01-01
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PREAI
errMatsumae, Takashi; Kurashima, Yuichi; Takagi, Hideki; Umezawa, Hitoshi; Higurashi, Eiji
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Heterogeneous direct bonding of diamond and semiconductor substrates using NH3/H2O2 cleaning
err2020-11-17
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PREAI
errFukumoto, Shoya; Matsumae, Takashi; Kurashima, Yuichi; Takagi, Hideki; Umezawa, Hitoshi; Hayase, Masanori; Higurashi, Eiji
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Room temperature bonding of aluminum nitride ceramic and semiconductor substrate氮化铝陶瓷与半导体基板的室温键合
err2020-11-01
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PREAI
errMatsumae, Takashi; Kurashima, Yuichi; Higurashi, Eiji; Nishizono, Kazunori; Amano, Tsutomu; Takagi, Hideki
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Fully epitaxial giant magnetoresistive devices with half-metallic Heusler alloy fabricated on poly-crystalline electrode using three-dimensional integration technology
err2020-11-01
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errChen, Jiamin; Sakuraba, Yuya; Yakushiji, Kay; Kurashima, Yuichi; Watanabe, Naoya; Liu, Jun; Li, Songtian; Fukushima, Akio; Takagi, Hideki; Kikuchi, Katsuya; Yuasa, Shinji; Hono, Kazuhiro
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Effect of Au Film Thickness and Surface Roughness on Room-Temperature Wafer Bonding and Wafer-Scale Vacuum Sealing by Au-Au Surface Activated Bonding
err2020-04-27
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errOAAI
errYamamoto, Michitaka; Matsumae, Takashi; Kurashima, Yuichi; Takagi, Hideki; Suga, Tadatomo; Takamatsu, Seiichi; Itoh, Toshihiro; Higurashi, Eiji
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Low-temperature direct bonding of β-Ga2O3 and diamond substrates under atmospheric conditions
err2020-04-09
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PREAI
errMatsumae, Takashi; Kurashima, Yuichi; Umezawa, Hitoshi; Tanaka, Koji; Ito, Toshimitsu; Watanabe, Hideyuki; Takagi, Hideki
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Hydrophilic low-temperature direct bonding of diamond and Si substrates under atmospheric conditions
err2020-01-01
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PREAI
errMatsumae, Takashi; Kurashima, Yuichi; UmezaWa, Hitoshi; Takagi, Hideki
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