未登录 New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition Ansari, Mohd Zahid; Janicek, Petr; Namgung, Sook; Kim, Hyangil; Nandi, Dip K.; Cheon, Taehoon; Siddiqui, Masoom Raza; Imran, Muhammad; Jang, Yujin; Bae, Jong-Seong; Hong, Tae Eun; Park, Chaehyun; Son, Yeseul; Kim, Sang Bok; Kimj, Soo-Hyun 分享 收藏
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Preparation of wafer-scale highly conformalamorphous hafnium dioxide thin films by atomic layer deposition using a thermally stable boratabenzene ligand-containing hafnium precursor Ansari, Mohd Zahid; Janicek, Petr; Park, Ye Jin; NamGung, Sook; Cho, Bo Yeon; Nandi, Dip K.; Jang, Yujin; Bae, Jong-Seong; Hong, Tae Eun; Cheon, Taehoon; Song, Wooseok; An, Ki-Seok; Kim, Soo-Hyun 分享 收藏
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Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen Park, Na-Yeon; Kim, Minsu; Kim, Youn-Hye; Ramesh, Rahul; Nandi, Dip K.; Tsugawa, Tomohiro; Shigetomi, Toshiyuki; Suzuki, Kazuharu; Harada, Ryosuke; Kim, Miso; An, Ki-Seok; Shong, Bonggeun; Kim, Soo-Hyun 分享 收藏
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Atomic Layer Deposition of Ru for Replacing Cu-Interconnects Kotsugi, Yohei; Han, Seung-Min; Kim, Youn-Hye; Cheon, Taehoon; Nandi, Dip K.; Ramesh, Rahul; Yu, Neung-Kyung; Son, Kirak; Tsugawa, Tomohiro; Ohtake, Shigeyuki; Harada, Ryosuke; Park, Young-Bae; Shong, Bonggeun; Kim, Soo-Hyun 分享 收藏
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Ultralow Loading (Single-Atom and Clusters) of the Pt Catalyst by Atomic Layer Deposition Using Dimethyl ((3,4-η) N,N-dimethyl-3-butene-1-amine-N) Platinum (DDAP) on the High-Surface-Area Substrate for Hydrogen Evolution Reaction Ramesh, Rahul; Han, Seungmin; Nandi, Dip K.; Sawant, Sandesh Y.; Kim, Deok Hyun; Cheon, Taehoon; Cho, Moo Hwan; Harada, Ryosuke; Shigetomi, Toshiyuki; Suzuki, Kazuharu; Kim, Soo-Hyun 分享 收藏
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Hydrogen Evolution Reaction by Atomic Layer-Deposited MoNx on Porous Carbon Substrates: The Effects of Porosity and Annealing on Catalyst Activity and Stability Ramesh, Rahul; Sawant, Sandesh Y.; Nandi, Dip K.; Kim, Tae Hyun; Kim, Deok Hyun; Han, Seung-Min; Jang, Yujin; Ha, Myoung Gyu; Cho, Moo Hwan; Yoon, Taeho; Kim, Soo-Hyun 分享 收藏
Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery Na离子电池中等离子体增强原子层沉积WS2阳极的厚度依赖性电化学响应 Nandi, Dip K.; Yeo, Seungmin; Ansari, Mohd Zahid; Sinha, Soumyadeep; Cheon, Taehoon; Kwon, Jiseok; Kim, Hyungjun; Heo, Jaeyeong; Song, Taeseup; Kim, Soo-Hyun 分享 收藏
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