未登录Synthetic-Ferromagnet Pinning Layers Enabling Top-Pinned Magnetic Tunnel Junctions for High-Density Embedded Magnetic Random-Access Memory合成铁磁体钉扎层可实现高密度嵌入式磁性随机存取存储器的顶部钉扎磁性隧道结
Liu, Enlong; Wu, Y. -C.; Couet, S.; Mertens, S.; Rao, S.; Kim, W.; Garello, K.; Crotti, D.; Van Elshocht, S.; De Boeck, J.; Kar, G. S.; Swerts, J.
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收藏Microwave Characterization of Ba-Substituted PZT and ZnO Thin Films
Tierno, Davide; Dekkers, Matthijn; Wittendorp, Paul; Sun, Xiao; Bayer, Samuel C.; King, Seth T.; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana P.; Adelmann, Christoph
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收藏Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties
Popovici, Mihaela; Groven, Benjamin; Marcoen, Kristof; Quan Manh Phung; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; van den Berg, Jaap A.; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Malgorzata; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph
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收藏Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
Groven, Benjamin; Heyne, Markus; Mehta, Ankit Nalin; Bender, Hugo; Nuytten, Thomas; Meersschaut, Johan; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies
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收藏Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
Wen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I.; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik W.; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J.; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph
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收藏Sacrificial Self-Assembled Monolayers for the Passivation of GaAs (100) Surfaces and Interfaces用于钝化GaAs (100) 表面和界面的牺牲自组装单层
Cuypers, Daniel; Fleischmann, Claudia; van Dorp, Dennis H.; Brizzi, Simone; Tallarida, Massimo; Mueller, Matthias; Hoenicke, Philipp; Billen, Arne; Chintala, Ravi; Conard, Thierry; Schmeisser, Dieter; Vandervorst, Wilfried; Van Elshocht, Sven; Armini, Silvia; De Gendt, Stefan; Adelmann, Christoph
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收藏[Co/Ni]-CoFeB hybrid free layer stack materials for high density magnetic random access memory applications
Liu, E.; Swerts, J.; Couet, S.; Mertens, S.; Tomczak, Y.; Lin, T.; Spampinato, V.; Franquet, A.; Van Elshocht, S.; Kar, G.; Furnemont, A.; De Boeck, J.
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收藏Thin Co/Ni-based bottom pinned spin-transfer torque magnetic random access memory stacks with high annealing tolerance
Tomczak, Y.; Swerts, J.; Mertens, S.; Lin, T.; Couet, S.; Liu, E.; Sankaran, K.; Pourtois, G.; Kim, W.; Souriau, L.; Van Elshocht, S.; Kar, G.; Furnemont, A.
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收藏BEOL compatible high tunnel magneto resistance perpendicular magnetic tunnel junctions using a sacrificial Mg layer as CoFeB free layer cap
Swerts, J.; Mertens, S.; Lin, T.; Couet, S.; Tomczak, Y.; Sankaran, K.; Pourtois, G.; Kim, W.; Meersschaut, J.; Souriau, L.; Radisic, D.; Van Elshocht, S.; Kar, G.; Furnemont, A.
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收藏Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
Nourbakhsh, Amirhasan; Adelmann, Christoph; Song, Yi; Lee, Chang Seung; Asselberghs, Inge; Huyghebaert, Cedric; Brizzi, Simone; Tallarida, Massimo; Schmeisser, Dieter; Van Elshocht, Sven; Heyns, Marc; Kong, Jing; Palacios, Tomas; De Gendt, Stefan
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收藏Metal-Insulator Transition in ALD VO2 Ultrathin Films and Nanoparticles: Morphological ControlALD VO2超薄膜和纳米颗粒中的金属-绝缘体转变: 形态控制
Peter, Antony P.; Martens, Koen; Rampelberg, Geert; Toeller, Michael; Ablett, James M.; Meersschaut, Johan; Cuypers, Daniel; Franquet, Alexis; Detavernier, Christophe; Rueff, Jean-Pascal; Schaekers, Marc; Van Elshocht, Sven; Jurczak, Malgorzata; Adelmann, Christoph; Radu, Iuliana P.
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收藏On the scalability of doped hafnia thin films
Adelmann, C.; Schram, T.; Chew, S. -A.; Woicik, J. C.; Brizzi, S.; Tallarida, M.; Schmeisser, D.; Horiguchi, N.; Van Elshocht, S.; Ragnarsson, L. -A.
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收藏Low leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20 nm technology node in dynamic random access memory
Popovici, M.; Swerts, J.; Redolfi, A.; Kaczer, B.; Aoulaiche, M.; Radu, I.; Clima, S.; Everaert, J. -L.; Van Elshocht, S.; Jurczak, M.
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收藏Growth evolution and characterization of ultra-thin CoGe2 films synthesized via a catalytic solid-vapour reaction technique
Peter, Antony Premkumar; Opsomer, Karl; Adelmann, Christoph; van Ammel, Annemie; Meersschaut, Johan; Moussa, Alain; Schaekers, Marc; Wen, Liang Gong; Zsolt, Tokei; Van Elshocht, Sven
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收藏Ultrathin NiGe Films Prepared via Catalytic Solid-Vapor Reaction of Ni with GeH4
Peter, Antony P.; Opsomer, Karl; Adelmann, Christoph; Schaekers, Marc; Meersschaut, Johan; Richard, Olivier; Vaesen, Inge; Moussa, Alain; Franquet, Alexis; Zsolt, Tokei; Van Elshocht, Sven
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收藏Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness
van den Berg, J. A.; Reading, M. A.; Bailey, P.; Noakes, T. C. Q.; Adelmann, C.; Popovici, M.; Tielens, H.; Conard, T.; de Gendt, S.; van Elshocht, S.
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