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Sven Van Elshocht

interuniversity microelectronics centre

42H指数
507论文数
7.1K被引数
收录论文 82
发表时间
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Diffusion-Mediated Growth and Size-Dependent Nanoparticle Reactivity during Ruthenium Atomic Layer Deposition on Dielectric Substrates
err2018-10-17
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errOAAI
errSoethoudt, Job; Grillo, Fabio; Marques, Esteban A.; van Ommen, J. Ruud; Tomczak, Yoann; Nyns, Laura; Van Elshocht, Sven; Delabie, Annelies
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Microwave Characterization of Ba-Substituted PZT and ZnO Thin Films
err2018-05-01
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errOAAI
errTierno, Davide; Dekkers, Matthijn; Wittendorp, Paul; Sun, Xiao; Bayer, Samuel C.; King, Seth T.; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana P.; Adelmann, Christoph
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Impact of Ta and W-based spacers in double MgO STT-MRAM free layers on perpendicular anisotropy and damping
err2017-10-11
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PREAI
errCouet, S.; Devolder, T.; Swerts, J.; Mertens, S.; Lin, T.; Liu, E.; Van Elshocht, S.; Kar, G. Sankar
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Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties
err2017-05-31
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PREAI
errPopovici, Mihaela; Groven, Benjamin; Marcoen, Kristof; Quan Manh Phung; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; van den Berg, Jaap A.; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Malgorzata; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph
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Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
err2017-03-16
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errOAAI
errGroven, Benjamin; Heyne, Markus; Mehta, Ankit Nalin; Bender, Hugo; Nuytten, Thomas; Meersschaut, Johan; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies
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Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
err2016-09-21
err105
PREAI
errWen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I.; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik W.; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J.; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph
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Sacrificial Self-Assembled Monolayers for the Passivation of GaAs (100) Surfaces and Interfaces用于钝化GaAs (100) 表面和界面的牺牲自组装单层
err2016-08-05
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PREAI
errCuypers, Daniel; Fleischmann, Claudia; van Dorp, Dennis H.; Brizzi, Simone; Tallarida, Massimo; Mueller, Matthias; Hoenicke, Philipp; Billen, Arne; Chintala, Ravi; Conard, Thierry; Schmeisser, Dieter; Vandervorst, Wilfried; Van Elshocht, Sven; Armini, Silvia; De Gendt, Stefan; Adelmann, Christoph
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[Co/Ni]-CoFeB hybrid free layer stack materials for high density magnetic random access memory applications
err2016-03-30
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PREAI
errLiu, E.; Swerts, J.; Couet, S.; Mertens, S.; Tomczak, Y.; Lin, T.; Spampinato, V.; Franquet, A.; Van Elshocht, S.; Kar, G.; Furnemont, A.; De Boeck, J.
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Thin Co/Ni-based bottom pinned spin-transfer torque magnetic random access memory stacks with high annealing tolerance
err2016-01-26
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PREAI
errTomczak, Y.; Swerts, J.; Mertens, S.; Lin, T.; Couet, S.; Liu, E.; Sankaran, K.; Pourtois, G.; Kim, W.; Souriau, L.; Van Elshocht, S.; Kar, G.; Furnemont, A.
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BEOL compatible high tunnel magneto resistance perpendicular magnetic tunnel junctions using a sacrificial Mg layer as CoFeB free layer cap
err2015-07-01
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PREAI
errSwerts, J.; Mertens, S.; Lin, T.; Couet, S.; Tomczak, Y.; Sankaran, K.; Pourtois, G.; Kim, W.; Meersschaut, J.; Souriau, L.; Radisic, D.; Van Elshocht, S.; Kar, G.; Furnemont, A.
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Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides
err2015-01-01
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PREAI
errNourbakhsh, Amirhasan; Adelmann, Christoph; Song, Yi; Lee, Chang Seung; Asselberghs, Inge; Huyghebaert, Cedric; Brizzi, Simone; Tallarida, Massimo; Schmeisser, Dieter; Van Elshocht, Sven; Heyns, Marc; Kong, Jing; Palacios, Tomas; De Gendt, Stefan
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Phase Formation and Morphology of Nickel Silicide Thin Films Synthesized by Catalyzed Chemical Vapor Reaction of Nickel with Silane
err2014-12-22
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PREAI
errPeter, Antony Premkumar; Meersschaut, Johan; Richard, Olivier; Moussa, Alain; Steenbergen, Johnny; Schaekers, Marc; Tokei, Zsolt; Van Elshocht, Sven; Adelmann, Christoph
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Metal-Insulator Transition in ALD VO2 Ultrathin Films and Nanoparticles: Morphological ControlALD VO2超薄膜和纳米颗粒中的金属-绝缘体转变: 形态控制
err2014-12-15
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PREAI
errPeter, Antony P.; Martens, Koen; Rampelberg, Geert; Toeller, Michael; Ablett, James M.; Meersschaut, Johan; Cuypers, Daniel; Franquet, Alexis; Detavernier, Christophe; Rueff, Jean-Pascal; Schaekers, Marc; Van Elshocht, Sven; Jurczak, Malgorzata; Adelmann, Christoph; Radu, Iuliana P.
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On the scalability of doped hafnia thin films
err2014-03-27
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errOAAI
errAdelmann, C.; Schram, T.; Chew, S. -A.; Woicik, J. C.; Brizzi, S.; Tallarida, M.; Schmeisser, D.; Horiguchi, N.; Van Elshocht, S.; Ragnarsson, L. -A.
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Low leakage Ru-strontium titanate-Ru metal-insulator-metal capacitors for sub-20 nm technology node in dynamic random access memory
err2014-02-26
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PREAI
errPopovici, M.; Swerts, J.; Redolfi, A.; Kaczer, B.; Aoulaiche, M.; Radu, I.; Clima, S.; Everaert, J. -L.; Van Elshocht, S.; Jurczak, M.
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Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2O
err2014-01-24
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PREAI
errHan, Jeong Hwan; Nyns, Laura; Delabie, Annelies; Franquet, Alexis; Van Elshocht, Sven; Adelmann, Christoph
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Growth evolution and characterization of ultra-thin CoGe2 films synthesized via a catalytic solid-vapour reaction technique
err2014-01-01
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PREAI
errPeter, Antony Premkumar; Opsomer, Karl; Adelmann, Christoph; van Ammel, Annemie; Meersschaut, Johan; Moussa, Alain; Schaekers, Marc; Wen, Liang Gong; Zsolt, Tokei; Van Elshocht, Sven
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Ultrathin NiGe Films Prepared via Catalytic Solid-Vapor Reaction of Ni with GeH4
err2013-09-19
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PREAI
errPeter, Antony P.; Opsomer, Karl; Adelmann, Christoph; Schaekers, Marc; Meersschaut, Johan; Richard, Olivier; Vaesen, Inge; Moussa, Alain; Franquet, Alexis; Zsolt, Tokei; Van Elshocht, Sven
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Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness
err2013-09-01
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errOAAI
errvan den Berg, J. A.; Reading, M. A.; Bailey, P.; Noakes, T. C. Q.; Adelmann, C.; Popovici, M.; Tielens, H.; Conard, T.; de Gendt, S.; van Elshocht, S.
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