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收藏CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration
Forsberg, Fredrik; Lapadatu, Adriana; Kittilsland, Gjermund; Martinsen, Stian; Roxhed, Niclas; Fischer, Andreas C.; Stemme, Goran; Samel, Bjorn; Ericsson, Per; Hoivik, Nils; Bakke, Thor; Bring, Martin; Kvisteroy, Terje; Ror, Audun; Niklaus, Frank
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收藏Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays
Forsberg, Fredrik; Roxhed, Niclas; Fischer, Andreas C.; Samel, Bjorn; Ericsson, Per; Hoivik, Nils; Lapadatu, Adriana; Bring, Martin; Kittilsland, Gjermund; Stemme, Goran; Niklaus, Frank
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