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Gerassimos Orkoulas

Widener University

35H指数
173论文数
3.9K被引数
收录论文 52
发表时间
Multiscale modeling of area-selective atomic layer deposition of SiO2 on Al2O3 and SiO2 surfaces with intermediate etching steps
err2026-01-27
err0
PREAI
errFeiyang Ou; Abdulrahman Alghamdi; Chun-Pei Lin; Gerassimos Orkoulas; Panagiotis D. Christofides
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Data-Driven Machine Learning Predictor Model for Optimal Operation of a Thermal Atomic Layer Etching Reactor
err2024-10-30
err1
PREAI
errWang, Henrik; Ou, Feiyang; Suherman, Julius; Tom, Matthew; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Integrating run-to-run control with feedback control for a spatial atomic layer etching reactor
err2024-03-01
err1
PREAI
errWang, Henrik; Tom, Matthew; Ou, Feiyang; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Sparse identification modeling and predictive control of wafer temperature in an atomic layer etching reactor
err2024-02-01
err4
errOAAI
errOu, Feiyang; Abdullah, Fahim; Wang, Henrik; Tom, Matthew; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation
err2023-10-01
err4
PREAI
errTom, Matthew; Wang, Henrik; Ou, Feiyang; Yun, Sungil; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor
err2022-12-01
err14
errOAAI
errTom, Matthew; Yun, Sungil; Wang, Henrik; Ou, Feiyang; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Atomistic-mesoscopic modeling of area-selective thermal atomic layer deposition区域选择性热原子层沉积的原子介观建模
err2022-12-01
err12
errOAAI
errYun, Sungil; Ou, Feiyang; Wang, Henrik; Tom, Matthew; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching
err2022-07-01
err15
PREAI
errYun, Sungil; Tom, Matthew; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Multivariable run-to-run control of thermal atomic layer etching of aluminum oxide thin films
err2022-06-01
err12
errOAAI
errYun, Sungil; Tom, Matthew; Ou, Feiyang; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design
err2022-05-01
err20
errOAAI
errYun, Sungil; Tom, Matthew; Ou, Feiyang; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Microscopic and data-driven modeling and operation of thermal atomic layer etching of aluminum oxide thin films
err2022-01-01
err18
errOAAI
errYun, Sungil; Tom, Matthew; Luo, Junwei; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Microscopic modeling and optimal operation of plasma enhanced atomic layer deposition
err2020-07-01
err23
errOAAI
errDing, Yangyao; Zhang, Yichi; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation
err2019-11-01
err45
errOAAI
errDing, Yangyao; Zhang, Yichi; Ren, Yi Ming; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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Synthesis of Nitrogen and Sulfur Codoped Nanoporous Carbons from Algae: Role in CO2 Separation
err2018-12-27
err24
errOAAI
errSaha, Dipendu; Thorpe, Ryan; Van Bramer, Scott E.; Alexander, Nicole; Hensley, Dale K.; Orkoulas, Gerassimos; Chen, Jihua
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One-step conversion of agro-wastes to nanoporous carbons: Role in separation of greenhouse gases
err2018-05-01
err25
PREAI
errSaha, Dipendu; Taylor, Bryan; Alexander, Nicole; Joyce, Daniel F.; Faux, Gabriela I.; Lin, Yiting; Shteyn, Vladimir; Orkoulas, Gerassimos
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CO2 capture in lignin-derived and nitrogen-doped hierarchical porous carbons
errCARBON
IF11.6
err2017-09-01
err126
errOAAI
errSaha, Dipendu; Van Bramer, Scott E.; Orkoulas, Gerassimos; Ho, Hoi-Chun; Chen, Jihua; Henley, Dale K.
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Modeling and control of ibuprofen crystal growth and size distribution布洛芬晶体生长和尺寸分布的建模与控制
err2015-09-01
err36
PREAI
errNayhouse, Michael; Anh Tran; Kwon, Joseph Sang-Il; Crose, Marquis; Orkoulas, Gerassimos; Christofides, Panagiotis D.
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