Meint J. de Boer - Publications, H-index & Citations

Meint J. de Boer

university of twente

27H指数

149论文数

3.0K被引数

收录论文 12

发表时间

Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD 通过LPCVD实现无匙孔的高纵横比沟槽填充的方法

MICROMACHINES

IF3

2022-11-04

OAAI

Veltkamp, Henk-Willem; Janssens, Yves L.; de Boer, Meint J.; Zhao, Yiyuan; Wiegerink, Remco J.; Tas, Niels R.; Lotters, Joost C.

A biomimetic accelerometer inspired by the cricket's clavate hair (vol 11, 20140438, 2014)

JOURNAL OF THE ROYAL SOCIETY INTERFACE

IF3.5

2020-11-25

OAAI

Droogendijk, H.; de Boer, M. J.; Sanders, R. G. P.; Krijnen, G. J. M.

Ultralow Broadband Reflectivity in Black Silicon via Synergy between Hierarchical Texture and Specific-Size Au Nanoparticles

ADVANCED OPTICAL MATERIALS

IF7.2

2020-07-26

OAAI

Zhang, Zengxing; Martinsen, Thomas; Liu, Guohua; Tayyib, Muhammad; Cui, Danfeng; de Boer, Meint J.; Karlsen, Frank; Jakobsen, Henrik; Xue, Chenyang; Wang, Kaiying

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology

MICROMACHINES

IF3

2020-05-31

OAAI

Zhao, Yiyuan; Veltkamp, Henk-Willem; Schut, Thomas V. P.; Sanders, Remco G. P.; Breazu, Bogdan; Groenesteijn, Jarno; de Boer, Meint J.; Wiegerink, Remco J.; Lotters, Joost C.

Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

MICROSYSTEMS & NANOENGINEERING

IF9.9

2020-03-23

OAAI

Ni, Shu; Berenschot, Erwin J. W.; Westerik, Pieter J.; de Boer, Meint J.; Wolf, Rene; Le-The, Hai; Gardeniers, Han J. G. E.; Tas, Niels R.

Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology

JOURNAL OF THE ROYAL SOCIETY INTERFACE

IF3.5

2014-10-06

OAAI

Droogendijk, H.; Brookhuis, R. A.; de Boer, M. J.; Sanders, R. G. P.; Krijnen, G. J. M.

A biomimetic accelerometer inspired by the cricket's clavate hair

JOURNAL OF THE ROYAL SOCIETY INTERFACE

IF3.5

2014-08-06

OAAI

Droogendijk, H.; de Boer, M. J.; Sanders, R. G. P.; Krijnen, G. J. M.

3D force sensor for biomechanical applications

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2012-08-01

OAAI

Brookhuis, R. A.; Lammerink, T. S. J.; Wiegerink, R. J.; de Boer, M. J.; Elwenspoek, M. C.

Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever

OPTICS EXPRESS

IF3.3

2011-08-04

OAAI

Abdulla, S. M. C.; Kauppinen, L. J.; Dijkstra, M.; de Boer, M. J.; Berenschot, E.; Jansen, H. V.; de Ridder, R. M.; Krijnen, G. J. M.

Micromechanically tuned ring resonator in silicon on insulator

OPTICS LETTERS

IF3.3

2011-03-16

OAAI

Kauppinen, Lasse J.; Abdulla, Shahina M. C.; Dijkstra, Meindert; de Boer, Meint J.; Berenschot, Erwin; Krijnen, Gijs J. M.; Pollnau, Markus; de Ridder, Rene M.

Nanoimprint lithography for nanophotonics in silicon

NANO LETTERS

IF9.1

2008-08-12

OAAI

Bruinink, Christiaan M.; Burresi, Matteo; de Boer, Meint J.; Segerink, Frans B.; Jansen, Henri V.; Berenschot, E.; Reinhoudt, David N.; Huskens, Jurriaan; Kuipers, L.

Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2008-05-01

PREAI

Dijkstra, M.; de Boer, M. J.; Berenschot, J. W.; Lammerink, T. S. J.; Wiegerink, R. J.; Elwenspoek, M.

研究方向