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M

Marc van de Wal

Philips

15H指数
42论文数
1.4K被引数
收录论文 6
发表时间
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Beyond decentralized wafer/reticle stage control design: A double-Youla approach for enhancing synchronized motion
errCONTROL ENGINEERING PRACTICE
IF4.6
err2019-02-01
err16
errOAAI
errEvers, Enzo; van de Wal, Marc; Oomen, Tom
err分享
err收藏
Non-diagonal H∞ weighting function design: Exploiting spatio-temporal deformations in precision motion control
errCONTROL ENGINEERING PRACTICE
IF4.6
err2015-02-01
err4
errOAAI
errBoeren, Frank; van Herpen, Robbert; Oomen, Tom; van de Wal, Marc; Steinbuch, Maarten
err分享
err收藏
Exploiting additional actuators and sensors for nano-positioning robust motion control
errMECHATRONICS
IF3.1
err2014-09-01
err36
PREAI
errvan Herpen, Robbert; Oomen, Tom; Kikken, Edward; van de Wal, Marc; Aangenent, Wouter; Steinbuch, Maarten
err分享
err收藏
Connecting System Identification and Robust Control for Next-Generation Motion Control of a Wafer Stage用于晶圆台下一代运动控制的连接系统识别和鲁棒控制
errIEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
IF3.9
err2014-01-01
err137
PREAI
errOomen, Tom; van Herpen, Robbert; Quist, Sander; van de Wal, Marc; Bosgra, Okko; Steinbuch, Maarten
err分享
err收藏
LPV control for a wafer stage: beyond the theoretical solution晶圆级的LPV控制: 超越理论解决方案
errCONTROL ENGINEERING PRACTICE
IF4.6
err2005-02-01
err133
PREAI
errWassink, MG; van de Wal, M; Scherer, C; Bosgra, O
err分享
err收藏
A review of methods for input/output selection
errAUTOMATICA
IF5.9
err2001-04-01
err326
PREAI
errvan de Wal, M; de Jager, B
err分享
err收藏

研究方向

暂时未获取到该数据
合作学者
合作期刊
M
M. Steinbuch
H 指数: 61 · 论文数: 1.0K
C
Carsten W. Scherer
H 指数: 41 · 论文数: 277
T
Tom Oomen
H 指数: 34 · 论文数: 492
B
Bram de Jager
H 指数: 31 · 论文数: 245
F
Frank Boeren
H 指数: 10 · 论文数: 24
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