P. Ekkels - Publications, H-index & Citations

P. Ekkels

interuniversity microelectronics centre

7H指数

32论文数

228被引数

收录论文 2

发表时间

Air gap-based MEMS switch technology using nickel surface micromachining

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2011-04-01

PREAI

Ekkels, P.; Rottenberg, X.; Czarnecki, P.; Philipsen, H.; Mertens, R.; Puers, R.; Tilmans, H. A. C.

Effect of substrate charging on the reliability of capacitive RF MEMS switches 基板充电对电容式RF MEMS开关可靠性的影响

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2009-09-01

PREAI

Czarnecki, P.; Rottenberg, X.; Soussan, P.; Ekkels, P.; Muller, P.; Nolmans, P.; De Raedt, W.; Tilmans, H. A. C.; Puers, R.; Marchand, L.; De Wolf, I.

研究方向