未登录Micromachined angular rate sensors for automotive applications
Neul, Reinhard; Gomez, Udo-Martin; Kehr, Kersten; Bauer, Wolfram; Classen, Johannes; Doering, Christian; Esch, Ermin; Goetz, Siegbert; Hauer, Joerg; Kuhlmann, Burkhard; Lang, Christoph; Veith, Michael; Willig, Rainer
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