logo
科言猫学术研究的AI总结
language
手机端手机端
  • Phone Feature微信小程序
简体中文简体中文
notice消息通知
博客博客
delete
arrow
返回
M

Mehran Mehregany

University System of Ohio

53H指数
358论文数
1.1W被引数
收录论文 37
发表时间
logo
Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries
errJOURNAL OF THE ELECTROCHEMICAL SOCIETY
IF3.3
err2019-12-06
err20
PREAI
errYasseen, AA; Zorman, CA; Mehregany, M
err分享
err收藏
Chemical-mechanical polishing for polysilicon surface micromachining
errJOURNAL OF THE ELECTROCHEMICAL SOCIETY
IF3.3
err2019-12-06
err29
PREAI
errYasseen, AA; Mourlas, NJ; Mehregany, M
err分享
err收藏
Surface roughness of LPCVD polysilicon and its influence on overlying electroless plated nickel
errJOURNAL OF THE ELECTROCHEMICAL SOCIETY
IF3.3
err2019-12-06
err1
PREAI
errRoy, S; Furukawa, S; Mehregany, M
err分享
err收藏
Celebrating the legacy of Wen H. Ko (1923-2017)
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2018-07-01
err0
PREAI
errMehregany, Mehran
err分享
err收藏
Thick PECVD silicon dioxide films for MEMS devices
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2016-04-01
err7
PREAI
errHo, Shih-Shian; Rajgopal, Srihari; Mehregany, Mehran
err分享
err收藏
Silicon carbide for microelectromechanical systems
errINTERNATIONAL MATERIALS REVIEWS
IF15.5
err2013-07-18
err141
PREAI
errMehregany, M; Zorman, CA; Roy, S; Fleischman, AJ; Wu, CH; Rajan, N
err分享
err收藏
Media compatible stainless steel capacitive pressure sensors
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2013-01-01
err15
PREAI
errHo, Shih-Shian; Rajgopal, Srihari; Mehregany, Mehran
err分享
err收藏
Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications
errJOURNAL OF THE ELECTROCHEMICAL SOCIETY
IF3.3
err2011-04-14
err18
PREAI
errFu, Xiao-An; Dunning, Jeremy L.; Mehregany, Mehran; Zorman, Christian A.
err分享
err收藏
Surface micromachining: A brief introduction
errMRS BULLETIN
IF4.9
err2011-01-31
err10
PREAI
errMehregany, M; Zorman, CA
err分享
err收藏
Thermal oxidation of silicon carbide: A comparison of n-type and p-type doped epitaxial layers
errAPPLIED PHYSICS LETTERS
IF3.6
err2011-01-28
err6
PREAI
errFu, Xiao-An; Okino, Kenji; Mehregany, Mehran
err分享
err收藏
Personal Navigation via High-Resolution Gait-Corrected Inertial Measurement Units通过高分辨率步态校正的惯性测量单元进行个人导航
errIEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
IF5.9
err2010-11-01
err146
errOAAI
errBebek, Oezkan; Suster, Michael A.; Rajgopal, Srihari; Fu, Michael J.; Huang, Xuemei; Cavusoglu, M. Cenk; Young, Darrin J.; Mehregany, Mehran; van den Bogert, Antonie J.; Mastrangelo, Carlos H.
err分享
err收藏
Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide Nanowires
errNANO LETTERS
IF9.1
err2010-07-16
err168
errOAAI
errFeng, X. L.; Matheny, M. H.; Zorman, C. A.; Mehregany, M.; Roukes, M. L.
err分享
err收藏
Observation of stacking faults formed during homoepitaxial growth of p-type 4H-SiC
errAPPLIED PHYSICS LETTERS
IF3.6
err2009-03-19
err6
PREAI
errSong, Ho Keun; Moon, Jeong Hyun; Kim, Hyeong Joon; Mehregany, Mehran
err分享
err收藏
A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2008-07-01
err99
PREAI
errChen, Li; Mehregany, Mehran
err分享
err收藏
Monocrystalline NbN nanofilms on a 3C-SiC/Si substrate
errAPPLIED PHYSICS LETTERS
IF3.6
err2007-08-06
err46
errOAAI
errGao, J. R.; Hajenius, M.; Tichelaar, F. D.; Klapwijk, T. M.; Voronov, B.; Grishin, E.; Gol'tsman, G.; Zorman, C. A.; Mehregany, M.
err分享
err收藏
Mechanical properties of a 3C-SiC film between room temperature and 600°C
errJOURNAL OF PHYSICS D-APPLIED PHYSICS
IF3.2
err2007-05-18
err40
PREAI
errPozzi, Michele; Hassan, Musaab; Harris, Alun J.; Burdess, Jim S.; Jiang, Liudi; Lee, Kin K.; Cheung, Rebecca; Phelps, Gordon J.; Wright, Nick G.; Zorman, Christian A.; Mehregany, Mehran
err分享
err收藏
A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2007-05-01
err23
PREAI
errNoh, Sangsoo; Fu, Xiaoan; Chen, Li; Mehregany, Mehran
err分享
err收藏
A SiC MEMS resonant strain sensor for harsh environment applications
errIEEE SENSORS JOURNAL
IF4.5
err2007-04-01
err167
PREAI
errAzevedo, Robert G.; Jones, Debbie G.; Jog, Anand V.; Jamshidi, Babak; Myers, David R.; Chen, Li; Fu, Xiao-an; Mehregany, Mehran; Wijesundara, Muthu B. J.; Pisano, Albert P.
err分享
err收藏
Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications
errIEEE SENSORS JOURNAL
IF4.5
err2006-04-01
err137
PREAI
errWu, CH; Zorman, CA; Mehregany, M
err分享
err收藏
SiC cantilever resonators with electrothermal actuation电热激励的SiC悬臂谐振器
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2006-04-01
err50
PREAI
errJiang, L; Cheung, R; Hedley, J; Hassan, M; Harris, AJ; Burdess, JS; Mehregany, M; Zorman, CA
err分享
err收藏

研究方向

暂时未获取到该数据
合作学者
合作期刊
L
L. Ley
H 指数: 81 · 论文数: 492
A
A. H. Heuer
H 指数: 78 · 论文数: 614
M
M. L. Roukes
H 指数: 78 · 论文数: 325
T
T. M. Klapwijk
H 指数: 71 · 论文数: 573
A
Antonie J. van den Bogert
H 指数: 65 · 论文数: 264
查看更多