Y.D. Chan - Publications, H-index & Citations | 科言猫

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Y.D. Chan

university of chinese academy of sciences, cas

12H指数

55论文数

428被引数

收录论文 2

发表时间

Direct evidence of reactive ion etching induced damages in Ge2Sb2Te5 based on different halogen plasmas 基于不同卤素等离子体的Ge2Sb2Te5反应离子刻蚀损伤的直接证据

APPLIED SURFACE SCIENCE

IF6.9

2016-08-01

23

PREAI

Li, Juntao; Xia, Yangyang; Liu, Bo; Feng, Gaoming; Song, Zhitang; Gao, Dan; Xu, Zhen; Wang, Weiwei; Chan, Yipeng; Feng, Songlin

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Observation of a new type of plasma etching damage: Damage to N-channel transistors arising from inductive metal loops

APPLIED PHYSICS LETTERS

IF3.6

1996-03-18

8

PREAI

Salah, A; Awadelkarim, OO; Preuninger, F; Chan, YD

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