未登录Silicon slot fin waveguide on bonded double-SOI for a low-power accumulation modulator fabricated by an anisotropic wet etching technique
Byers, James; Debnath, Kapil; Arimoto, Hideo; Husain, M. Khaled; Sotto, Moise; Li, Zuo; Liu, Fayong; Ibukuro, Kouta; Khokhar, Ali; Kiang, Kian; Boden, Stuart A.; Thomson, David J.; Reed, Graham T.; Saito, Shinichi
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