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王

王磊杰 (Leijie Wang Leijie Wang)

tsinghua university

2H指数
5论文数
12被引数
收录论文 2
发表时间
Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer
err2017-01-01
err6
PREAI
errZhang, Ming; Ni, Chang; Zhu, Yu; Wang, Leijie; Hu, Chuxiong; Hu, Jinchun
err分享
err收藏
Novel homodyne frequency-shifting interference pattern locking system
err2016-01-01
err17
PREAI
errZhu, Yu; Wang, Leijie; Zhang, Ming; Lu, Sen; Yang, Kaiming; Hu, Chuxiong
err分享
err收藏

研究方向

nano/sub-nanometer measurement precision光刻机超精密光栅干涉仪位移测量技术全息光栅制造技术基础理论与关键技术