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Chao‐Chang A. Chen

cmp innovation center

16H指数
63论文数
765被引数
收录论文 13
发表时间
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Recent Advances In Silicon Carbide Chemical Mechanical Polishing Technologies碳化硅化学机械抛光技术的最新进展
err2022-10-16
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errOAAI
errHsieh, Chi-Hsiang; Chang, Che-Yuan; Hsiao, Yi-Kai; Chen, Chao-Chang A.; Tu, Chang-Ching; Kuo, Hao-Chung
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Material removal mechanism of Cu-CMP studied by nano-scratching under various environmental conditions
errWEAR
IF6.1
err2012-03-01
err20
PREAI
errFu, Wei-En; Chen, Chao-Chang A.; Huang, Kuo-Wei; Chang, Yong-Qing
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