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收藏Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis
Daubriac, Richard; Cancellara, Leonardo; Chehadi, Zeinab; Lu, Lu; Thuries, Louis; Khaled, Mohamed Ali; Roze, Fabien; Jourdan, Nicolas; Tokei, Zsolt; Descamps-Mandine, Armel; Hungria, Teresa; Fazzini, Pier-Francesco; Tabata, Toshiyuki; Huet, Karim
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收藏Low-temperature electronic transport properties of ruthenium thin films and nanowires
Mai, Nikolai; Heinzel, Thomas; Cerchez, Mihai; Dutta, Shibesh; Gupta, Anshul; Kundu, Shreya; Talmelli, Giacomo; Ciubotaru, Florin; Tokei, Zsolt; Adelmann, Christoph
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收藏Properties of Nb x Ti(1-x)N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits
Lozano, Daniel Perez; Soulie, Jean-Philippe; Hodges, Blake; Piao, Xiaoyu; O'Neal, Sabine; Valente-Feliciano, Anne-Marie; Herr, Quentin; Tokei, Zsolt; Kim, Min-Soo; Herr, Anna
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收藏Properties of ultrathin molybdenum films for interconnect applications
Founta, Valeria; Soulie, Jean-Philippe; Sankaran, Kiroubanand; Vanstreels, Kris; Opsomer, Karl; Morin, Pierre; Lagrain, Pieter; Franquet, Alexis; Vanhaeren, Danielle; Conard, Thierry; Meersschaut, Johan; Detavernier, Christophe; Van de Vondel, Joris; De Wolf, Ingrid; Pourtois, Geoffrey; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph
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收藏Metal induced charge transfer doping in graphene-ruthenium hybrid interconnects
Achra, Swati; Wu, Xiangyu; Trepalin, Vadim; Nuytten, Thomas; Ludwig, Jonathan; Afanas'ev, Valeri; Brems, Steven; Soree, Bart; Tokei, Zsolt; Heyns, Marc; Asselberghs, Inge
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收藏Enhancing interface doping in graphene-metal hybrid devices using H2 plasma clean
Achra, Swati; Akimoto, Tomoki; de Marneffe, Jean-Francois; Sergeant, Stefanie; Wu, Xiangyu; Nuytten, Thomas; Brems, Steven; Asselberghs, Inge; Tokei, Zsolt; Ueno, Kazuyoshi; Heyns, Marc
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收藏Cu passivation for integration of gap-filling ultralow-k dielectrics
Zhang, Liping; de Marneffe, Jean-Francois; Lesniewska, Alicja; Verdonck, Patrick; Heylen, Nancy; Murdoch, Gayle; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt; De Gendt, Stefan; Baklanov, Mikhail R.
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收藏Integration of porous low-k dielectrics using post porosity pore protection
Zhang, Liping; de Marneffe, Jean-Francois; Verdonck, Patrick; Heylen, Nancy; Wen, Liang Gong; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhail R.
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收藏Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
Wen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I.; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik W.; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J.; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph
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收藏Transition metal contacts to graphene
Politou, Maria; Asselberghs, Inge; Radu, Iuliana; Conard, Thierry; Richard, Olivier; Lee, Chang Seung; Martens, Koen; Sayan, Safak; Huyghebaert, Cedric; Tokei, Zsolt; De Gendt, Stefan; Heyns, Marc
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