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Zsolt Tökei

Karlsruhe Institute of Technology

30H指数
366论文数
3.9K被引数
收录论文 31
发表时间
System Scenario-Based Design of the Last-Level Cache in Advanced Interconnect-Dominant Technology Nodes基于系统场景的高级互连主导技术节点中末级缓存的设计
err2025-09-01
err1
errOAAI
errMayahinia, Mahta; Marinelli, Tommaso; Pei, Zhenlin; Liu, Hsiao-Hsuan; Pan, Chenyun; Tokei, Zsolt; Catthoor, Francky; Tahoori, Mehdi
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Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis
err2025-01-07
err0
errOAAI
errDaubriac, Richard; Cancellara, Leonardo; Chehadi, Zeinab; Lu, Lu; Thuries, Louis; Khaled, Mohamed Ali; Roze, Fabien; Jourdan, Nicolas; Tokei, Zsolt; Descamps-Mandine, Armel; Hungria, Teresa; Fazzini, Pier-Francesco; Tabata, Toshiyuki; Huet, Karim
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Low-temperature electronic transport properties of ruthenium thin films and nanowires
err2024-11-21
err0
PREAI
errMai, Nikolai; Heinzel, Thomas; Cerchez, Mihai; Dutta, Shibesh; Gupta, Anshul; Kundu, Shreya; Talmelli, Giacomo; Ciubotaru, Florin; Tokei, Zsolt; Adelmann, Christoph
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Ultra-Scaled E-Tree-Based SRAM Design and Optimization With Interconnect Focus
err2024-10-01
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PREAI
errPei, Zhenlin; Liu, Hsiao-Hsuan; Mayahinia, Mahta; Tahoori, Mehdi B.; Catthoor, Francky; Tokei, Zsolt; Abdi, Dawit Burusie; Myers, James; Pan, Chenyun
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Properties of Nb x Ti(1-x)N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits
err2024-06-10
err0
errOAAI
errLozano, Daniel Perez; Soulie, Jean-Philippe; Hodges, Blake; Piao, Xiaoyu; O'Neal, Sabine; Valente-Feliciano, Anne-Marie; Herr, Quentin; Tokei, Zsolt; Kim, Min-Soo; Herr, Anna
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Selectivity and Growth Rate Modulations for Ruthenium Area-selective Deposition by Co-Reagent and Nanopattern Design
err2024-01-12
err1
errOAAI
errMandal, Akhilesh Kumar; van der Veen, Marleen H.; Haghighi, Negin Rahnemai; Robson, Max; Claessens, Niels; Meersschaut, Johan; Jourdan, Nicolas; Tokei, Zsolt; Delabie, Annelies
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First-principles investigation of thickness-dependent electrical resistivity for low-dimensional interconnects
err2023-09-11
err8
PREAI
errVan Troeye, Benoit; Sankaran, Kiroubanand; Tokei, Zsolt; Adelmann, Christoph; Imec, Geoffrey Pourtois
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Properties of ultrathin molybdenum films for interconnect applications
err2022-08-01
err34
errOAAI
errFounta, Valeria; Soulie, Jean-Philippe; Sankaran, Kiroubanand; Vanstreels, Kris; Opsomer, Karl; Morin, Pierre; Lagrain, Pieter; Franquet, Alexis; Vanhaeren, Danielle; Conard, Thierry; Meersschaut, Johan; Detavernier, Christophe; Van de Vondel, Joris; De Wolf, Ingrid; Pourtois, Geoffrey; Tokei, Zsolt; Swerts, Johan; Adelmann, Christoph
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Metal induced charge transfer doping in graphene-ruthenium hybrid interconnects
errCARBON
IF11.6
err2021-10-01
err14
PREAI
errAchra, Swati; Wu, Xiangyu; Trepalin, Vadim; Nuytten, Thomas; Ludwig, Jonathan; Afanas'ev, Valeri; Brems, Steven; Soree, Bart; Tokei, Zsolt; Heyns, Marc; Asselberghs, Inge
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Ab initio screening of metallic MAX ceramics for advanced interconnect applications
err2021-05-24
err32
errOAAI
errSankaran, Kiroubanand; Moors, Kristof; Tokei, Zsolt; Adelmann, Christoph; Pourtois, Geoffrey
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Enhancing interface doping in graphene-metal hybrid devices using H2 plasma clean
err2021-02-01
err12
PREAI
errAchra, Swati; Akimoto, Tomoki; de Marneffe, Jean-Francois; Sergeant, Stefanie; Wu, Xiangyu; Nuytten, Thomas; Brems, Steven; Asselberghs, Inge; Tokei, Zsolt; Ueno, Kazuyoshi; Heyns, Marc
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Temperature-dependent resistivity of alternative metal thin films
err2020-07-29
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errOAAI
errSiniscalchi, Marco; Tierno, Davide; Moors, Kristof; Tokei, Zsolt; Adelmann, Christoph
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Low-frequency noise and thermal equilibrium properties of vacancies
err2020-05-11
err0
errOAAI
errBeyne, Sofie; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof
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Boosting Carrier Mobility of Synthetic Few Layer Graphene on SiO2 by Interlayer Rotation and Decoupling
err2018-05-22
err18
PREAI
errWu, Xiangyu; Chuang, Yaoteng; Contino, Antonino; Soree, Bart; Brems, Steven; Tokei, Zsolt; Heyns, Marc; Huyghebaert, Cedric; Asselberghs, Inge
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Study of the enhanced electromigration performance of Cu(Mn) by low-frequency noise measurements and atom probe tomography
err2017-08-23
err9
errOAAI
errBeyne, Sofie; Arnoldi, Laurent; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof
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Cu passivation for integration of gap-filling ultralow-k dielectrics
err2016-12-05
err3
PREAI
errZhang, Liping; de Marneffe, Jean-Francois; Lesniewska, Alicja; Verdonck, Patrick; Heylen, Nancy; Murdoch, Gayle; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt; De Gendt, Stefan; Baklanov, Mikhail R.
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Integration of porous low-k dielectrics using post porosity pore protection
err2016-11-17
err1
PREAI
errZhang, Liping; de Marneffe, Jean-Francois; Verdonck, Patrick; Heylen, Nancy; Wen, Liang Gong; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; De Gendt, Stefan; Baklanov, Mikhail R.
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Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper
err2016-09-21
err105
PREAI
errWen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I.; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Osterberg, Frederik W.; Hansen, Ole; Petersen, Dirch H.; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J.; Van Elshocht, Sven; Croes, Kristof; Bommels, Jurgen; Tokei, Zsolt; Adelmann, Christoph
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Transition metal contacts to graphene
err2015-10-15
err36
PREAI
errPolitou, Maria; Asselberghs, Inge; Radu, Iuliana; Conard, Thierry; Richard, Olivier; Lee, Chang Seung; Martens, Koen; Sayan, Safak; Huyghebaert, Cedric; Tokei, Zsolt; De Gendt, Stefan; Heyns, Marc
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