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U

U. Schmid

tu wien

36H指数
443论文数
5.3K被引数
收录论文 102
发表时间
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XPS investigation of gas cluster ion beam effects on the Si-face of 4H-SiC towards damage-free surface cleaningXPS研究气体团簇离子束对4H-SiC硅面无损伤表面清洁的影响
errApplied Surface Science
IF6.9
err2026-08-13
err0
errOAAI
errR. Raad; M. Sauer; G. Pfusterschmied; U. Schmid
err分享
err收藏
Modeling and Measurement of Noise in Aluminium Nitride Piezoelectric MEMS
errAdvanced Electronic Materials
IF5.3
err2026-01-22
err0
errOAAI
errSina Zare Pakzad; Patrick Egger; Negin Rahnemai Haghighi; Shareena Muringakodan; Mahdi Mortada; Proloy T. Das; Keith C. Schwab; Ulrich Schmid; Michael Schneider
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Mechano-mechanical parametric coupling in MEMS between GHz and kHz frequency regimes at room temperature在MEMS中，GHz与kHz频率区间之间的机-机参数耦合（室温条件下）
errMicrosystems & Nanoengineering
IF9.9
err2026-01-09
err0
errOAAI
errMinHee Kwon; Holger Arthaber; Daniel Platz; Ulrich Schmid
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Automated contactless characterization of local thin film thickness and film stress with standard MEMS structures at wafer level基于标准MEMS结构在晶圆级对局部薄膜厚度和薄膜应力的自动化无接触表征
errJournal of Sensors and Sensor Systems
IF0.7
err2026-01-08
err0
PREAI
errHuber, Dominik; Schallert, Christoph; Gesing, Andre; Steinmuller-Nethl, Doris; Pfusterschmied, Georg; Schmid, Ulrich
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Local pressure field distribution of bistable PMUTs for distance sensing
errJOURNAL OF SENSORS AND SENSOR SYSTEMS
IF0.7
err2025-10-21
err0
errOAAI
errSchneider, Michael; Mortada, Mahdi; Mayrhofer, Dominik; Kaltenbacher, Manfred; Schmid, Ulrich
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The interplay of pre-stress and higher-order basis functions in Galerkin-based postbuckling analysis of a von Karman plate冯·卡曼板在伽辽金法后屈曲分析中预应力和高阶基函数的相互作用
errInternational Journal of Non-Linear Mechanics
IF3.2
err2025-07-28
err0
errOAAI
errDaniel Platz; Johannes Fabian; Ulrich Schmid
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Multimodal electromechanics with niobium vacuum gap capacitor membranes多模态电机械系统与铌真空间隙电容器膜
errsensors and actuators a physical
IF0
err2025-07-03
err0
errOAAI
errIoan Ignat; Elisabet Arvidsson; August Roos; Ermes Scarano; Jakob Gruber; Daniel Platz; Ulrich Schmid
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On the 3D Stokes flow around non-slender MEMS resonators关于非细长MEMS谐振器周围的三维斯托克斯流
errComputers & Fluids
IF3
err2025-05-22
err0
errOAAI
errA. Gesing; D. Platz; U. Schmid
err分享
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High-resolution parametric characterization of snap-through behaviour in bistable PiezoMEMS membranes双稳态压电微机电系统（PiezoMEMS）膜中翻转行为的超高分辨率参数表征
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2025-05-01
err0
PREAI
errMortada, Mahdi; Das, Proloy Taran; Schmid, Ulrich; Schneider, Michael
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Fully dielectric acoustic Bragg mirror of a-SiOCN:H and a-SiC:H layers for bulk acoustic wave resonators全介质a-SiOCN:H和a-SiC:H层声学布喇格反射镜用于体声波谐振器
errJOURNAL OF APPLIED PHYSICS
IF2.5
err2025-04-08
err0
errOAAI
errBerger, Claudio; Schiek, Maximilian; Schneider, Michael; Pfusterschmied, Georg; Schmid, Ulrich
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Ultra-low CTE-mismatch of 3C-SiC-on-Si thin films for high temperature MEMS applications
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2025-04-01
err0
PREAI
errMoll, Philipp; Pfusterschmied, Georg; Schmid, Barbara; Schwarz, Sabine; Artner, Werner; Schmid, Ulrich
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Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2024-07-01
err3
errOAAI
errMoll, Philipp; Pfusterschmied, Georg; Schwarz, Sabine; Stoeger-Pollach, Michael; Schmid, Ulrich
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Scalable electromagnetic energy harvester for wind turbine rotor blade applications
errSMART MATERIALS AND STRUCTURES
IF3.8
err2024-04-18
err0
errOAAI
errSchloegl, Matthias; Schneider, Michael; Schmid, Ulrich
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Characterization of Surface Modifications in Oxygen Plasma-Treated Teflon AF1600
errLANGMUIR
IF3.9
err2024-02-21
err0
errOAAI
errXiang, Yijie; Fulmek, Paul; Sauer, Markus; Foelske, Annette; Schmid, Ulrich
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Functionalization of three-dimensional epitaxial graphene with metal nanoparticles
errNANOSCALE
IF5.1
err2024-01-01
err0
errOAAI
errPompei, Emanuele; Vlamidis, Ylea; Ferbel, Letizia; Zannier, Valentina; Rubini, Silvia; Esteban, Daniel Arenas; Bals, Sara; Marinelli, Carmela; Pfusterschmied, Georg; Leitgeb, Markus; Schmid, Ulrich; Heun, Stefan; Veronesi, Stefano
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Three-dimensional graphene on a nano-porous 4H-silicon carbide backbone: a novel material for food sensing applications
errJOURNAL OF THE SCIENCE OF FOOD AND AGRICULTURE
IF3.5
err2023-11-27
err1
PREAI
errVeronesi, Stefano; Vlamidis, Ylea; Ferbel, Letizia; Marinelli, Carmela; Sanmartin, Chiara; Taglieri, Isabella; Pfusterschmied, Georg; Leitgeb, Markus; Schmid, Ulrich; Mencarelli, Fabio; Heun, Stefan
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Aluminum nitride surface acoustic wave resonators with high Qf product by optical lithography
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2023-11-01
err2
errOAAI
errKwon, Minhee; Ignat, Ioan; Platz, Daniel; Arthaber, Holger; Schmid, Ulrich
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The gas-liquid-Q-factor-inversion in MEMS plate resonators
errJOURNAL OF SOUND AND VIBRATION
IF4.9
err2023-09-01
err1
errOAAI
errGesing, Andre; Tran, Thomas; Huber, Dominik; Steinmueller-Nethl, Doris; Pfusterschmied, Georg; Schneider, Michael; Platz, Daniel; Schmid, Ulrich
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Study of hydrogen absorption in a novel three-dimensional graphene structure: Towards hydrogen storage applications
errAPPLIED SURFACE SCIENCE
IF6.9
err2023-04-01
err21
errOAAI
errMacili, Aureliano; Vlamidis, Ylea; Pfusterschmied, Georg; Leitgeb, Markus; Schmid, Ulrich; Heun, Stefan; Veronesi, Stefano
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Stress engineering of polycrystalline aluminum nitride thin films for strain sensing with resonant piezoelectric microbridges
errSENSORS AND ACTUATORS A-PHYSICAL
IF4.9
err2023-01-01
err8
errOAAI
errSchloegl, M.; Weissenbach, J.; Schneider, M.; Schmid, U.
err分享
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研究方向

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