未登录Mitigating Re-Entrant Etch Profile Undercut in Au Etch with an Aqua Regia Variant
Ferguson, Mark; Najah, Mohamed; Banville, Frederic; Boucherit, Mohamed; Miriyala, Naresh; Renaud, Jacques; Frechette, Luc; Boone, Francois; Ecoffey, Serge; Charlebois, Serge A.
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