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Stiharu, Ion

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Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer
err2023-08-17
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errOAAI
errLiu, Guowen; Liu, Yu; Li, Zhaohan; Ma, Zhikang; Ma, Xiao; Wang, Xuefeng; Zheng, Xudong; Jin, Zhonghe; Stiharu, Ion
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