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A multi-component solder self-assembled micromirror
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DOI：10.1016/S0924-4247(02)00331-X.png)
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Solder self-assembled micromirrors have the advantages of rigid electrical and structural connections to the substrate as well as compact assembly mechanisms. In addition solder assembly allows a structure to be rotated to any angle desired. This work presents a design process that uses these advantages to produce a novel electrostatic micromirror that can stably rotate +/-10degrees from its assembled position in a rotation range that does not include the plane of the substrate. The compact solder mechanism allows each of three mirror components to be assembled independently to individual angles. A lumped parameter model based on a torque balance between the electrostatic force on the mirror and the restoring torque of the torsion beams is used to create the mirror design. After fabrication and assembly the design is statically tested and compared to the predicted model performance. (C) 2003 Elsevier Science B.V. All rights reserved.
Keyword:
micromirror
torsional
electrostatic
solder
self-assembled
MEMS
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4.9
论文数:
1.5W
被引数:
3.3W
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