Angle-resolved annular data acquisition method for microellipsometry

doi:10.1364/OE.15.018056

Angle-resolved annular data acquisition method for microellipsometry

2007-01-01

33

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DOI：10.1364/OE.15.018056

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An ellipsometric data acquisition method is introduced to measure the optical properties of sample. It is based on a microellipsometer hardware layout integrated a high numerical aperture objective lens, which is aligned in the normal direction of sample surface. This technique enables to achieve ellipsometric data at multiple incident angle with a sub-mu m probe beam size, moreover real-time measurement is possible due to no moving parts. The experimental results of different SiO2 thin film are demonstrated, also calibration technique is described. (c) 2007 Optical Society of America.

Keyword:

BEAM PROFILE REFLECTOMETRY

IMAGING MICROELLIPSOMETRY

ELLIPSOMETRY

SILICON

MICROSCOPY

RESOLUTION

Angle-resolved annular data acquisition method for microellipsometry

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