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Autofocusing method for high-resolution three-dimensional profilometry
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DOI：10.1364/OL.382431.png)
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State-of-the-art high-accuracy three-dimensional (3D) profilometry systems typically use a lens with a fixed focal length, making it difficult for them to measure scenes with large depth variations, especially dynamically changing ones. To address this need, this Letter proposes a novel, to the best of our knowledge, autofocusing method for high-resolution 3D profilometry with a digital fringe projection technique by (1) developing a novel continuous geometric parameter model for systems using electrically tunable lenses and (2) employing a focal plane detection algorithm. The validity of the proposed method is confirmed, by experiments. (C) 2020 Optical Society of America
Keyword:
SHAPE MEASUREMENT
MICROSCOPY
期刊
IF:
3.3
论文数:
4.0W
被引数:
7.6W
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