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Correlation-based smoothing model for optical polishing
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DOI：10.1364/OE.21.028771.png)
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摘要
En 中文
A generalized model is developed to quantitatively describe the smoothing effects from different polishing tools used for optical surfaces. The smoothing effect naturally corrects mid-to-high spatial frequency errors that have features small compared to the size of the polishing lap. The original parametric smoothing model provided a convenient way to compare smoothing efficiency of different polishing tools for the case of sinusoidal surface irregularity, providing the ratio of surface improvement via smoothing to the bulk material removal. A new correlation-based smoothing model expands the capability to quantify smoothing using general surface data with complex irregularity. For this case, we define smoothing as a band-limited correlated component of the change in the surface and original surface. Various concepts and methods, such as correlation screening, have been developed and verified to manipulate the data for the calculation of smoothing factor. Data from two actual polishing runs from the Giant Magellan Telescope off-axis segment and the Large Synoptic Survey Telescope monolithic primary-tertiary mirror were processed, and a quantitative evaluation for the smoothing efficiency of a large pitch lap and a conformal lap with polishing pads is provided. (C) 2013 Optical Society of America
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IF:
3.3
论文数:
6.1W
被引数:
14.3W
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