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Development of LRRM and TRL Calibration Kits for On-Wafer Microwave Measurements at the Nanoscale
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DOI：10.1109/NEMO59437.2024.11395801.png)
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Abstract
En 中文
As RF and microwave technologies progress, achieving accurate characterization of nano-devices becomes increasingly challenging, especially due to the necessity for specialized calibration standards operating at the nanoscale with high impedance. In this study, we present the development of nano-scale vector network analyzer (VNA) calibration standards customized for on-wafer measurements of nano-components. Furthermore, we delve into the simulation-driven application and results of TRL and LRRM calibration techniques.
Keywords:
S-parameters
Coplanar waveguide (CPW)
Vector Network Calibration (VNA) calibration
3D electromagnetic simulations
On-wafer measurement