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Enhanced accuracy in 3D structured illumination microscopy through binary encoding with accelerated speed using sampling Moiré
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DOI：10.1016/j.optlaseng.2024.108297.png)
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Structured Illumination Microscopy (SIM) is widely recognized as a precise and stable technique for threedimensional inspection. However, efficiently achieving precise results still poses a challenge to be addressed. This research paper presents significant advancements aimed at enhancing the precision and efficiency of the SIM system. We leverage the defocus sensitivity of binary fringes, which yields more accurate height mapping, reducing the error by an outstanding 5% to 20%. Additionally, we introduce a novel technique called sampling Moire (SM) for modulation decoding from a single shot, resulting in a reduction of camera exposure time by (N - 1)/N compared to the N-step phase shift technique and a minimum 20% reduction in error compared to the Fourier transform (FT). These advancements elevate the system's precision and increase efficiency, making SIM an even more powerful tool for high-quality three-dimensional (3D)inspections.
Keyword:
SIM
Fringe modulation
Binary encoding
Sampling Moir & eacute
期刊
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3.7
论文数:
7.3K
被引数:
1.7W
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