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Highly efficient electron gun with a single-atom electron source
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DOI：10.1063/1.2720348.png)
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The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; similar to 80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a Zr/O/W Schottky gun. At the pressure of less than 1x10(-9) Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes. (c) 2007 American Institute of Physics.
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FIELD-EMISSION
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MICROSCOPY
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