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Light-Sheet Microscopy for Surface Topography Measurements and Quantitative Analysis
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DOI：10.3390/s20102842.png)
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摘要
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A novel light-sheet microscopy (LSM) system that uses the laser triangulation method to quantitatively calculate and analyze the surface topography of opaque samples is discussed. A spatial resolution of at least 10 mu m in z-direction, 10 mu m in x-direction and 25 mu m in y-direction with a large field-of-view (FOV) is achieved. A set of sample measurements that verify the system ' s functionality in various applications are presented. The system has a simple mechanical structure, such that the spatial resolution is easily improved by replacement of the objective, and a linear calibration formula, which enables convenient system calibration. As implemented, the system has strong potential for, e.g., industrial sample line inspections, however, since the method utilizes reflected/scattered light, it also has the potential for three-dimensional analysis of translucent and layered structures.
Keyword:
light-sheet microscopy (LSM)
laser triangulation
surface topography
line scanning
3D reconstruction
quantitative analysis
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3.5
论文数:
7.2W
被引数:
20.9W
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