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Multi-scale Alignment and Positioning System - MAPS
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DOI：10.1016/j.precisioneng.2012.03.002.png)
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摘要
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In this article we describe the design of a universal ultra-precision positioning platform to be used in the development of many different nano-manufacturing processes. The system incorporates the concept of employing different interchangeable manufacturing and characterization tools with one ultra-precision positioning system. A multi-linear-motor-driven XY planar stage floating on a thin film of air is used to traverse a substrate through a 10 mm x 10 mm travel range with an XY linear position resolution of less than 1 nm and an angular resolution about the Z axis of 0.05 mu rad over a range of about a degree (determined by plane mirror interferometer optics). A piezoelectric transducer (PZT) driven tripod positioning system is used to align each manufacturing and characterization tool with the substrate through a travel range of 40 mu m along the Z axis and 245 mu rad of rotation about the X and Y axes. The mechanical design, an overview of the system error analysis, preliminary component performance results, and the results of the first micro-imprint fabricated with the machine are presented. (C) 2012 Elsevier Inc. All rights reserved.
Keyword:
Error budget
Nano-imprint lithography
Precision machine design
Ultra-precision platform
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