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Optical beam steering using MEMS-controllable microlens array
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DOI：10.1016/S0924-4247(01)00609-4.png)
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摘要
En 中文
Novel, two-dimensional MEMS-controllable microlens array has been integrated with a vertical cavity surface emitting laser (VCSEL) array using flip-chip assembly. The MEMS/VCSEL hybrid system is built as an efficient and reliable smart pixel array for board-to-board or chip-to-chip optical interconnects in digital systems. Theory including geometrical and Fourier transform analysis and beam steering experimental results are presented. By translating polymer microlens, fabricated on a MEMS X-Y movable plate, using electro-thermal actuators, a beam steering angle of 70 mrad is achieved. VCSEL beam steering was successfully demonstrated in our MEMS/VCSEL hybrid system to collimate and steer laser beam for a precision alignment in a two-dimensional free-space optical interconnect. (C) 2001 Elsevier Science B.V. All rights reserved.
Keyword:
microlens
beam steering
flip-chip
optical interconnects
MEMS
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期刊
IF:
4.9
论文数:
1.5W
被引数:
3.3W
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