Robust white light algorithm for scanning error compensation

Yulan Chen

doi:10.1016/j.optlaseng.2025.109160

2025-06-17

PRE

DOI：10.1016/j.optlaseng.2025.109160

原文链接

原文求助

摘要

En 中文

• 补偿扫描误差和振动，提高白光系统中的表面测量精度。 • 自适应方法从噪声数据中提取包络和相位，性能优于传统技术。 • 减少鬼影阶梯，并在不同噪声水平下实现亚纳米精度。 • 消除硬件修改，降低系统成本同时保持可靠性。

期刊

Optics and Lasers in Engineering

IF:

3.7

论文数:

7.3K

被引数:

1.7W

机构

暂无机构信息

引用论文

Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms

Optical Engineering

IF0

2000-04-01

PREAI

Min-Cheol Park

Reduction of chromatic aberration influences in vertical scanning white-light interferometry

Measurement Science and Technology

IF0

2014-04-16

PREAI

Peter Lehmann; Peter Kühnhold; Weichang Xie

White-light interferometry on rough surfaces--measurement uncertainty caused by surface roughness

Applied Optics

IF0

2008-05-21

PREAI

Pavel Pavliček; Ondřej Hýbl

Surface measurement errors using commercial scanning white light interferometers

Measurement Science and Technology

IF0

2007-12-17

OAAI

F Gao; R K Leach; J Petzing; J M Coupland

Multiwavelength wavefront detection based on a lateral shear interferometer and polarization phase-shifting techniques

IF0

2018-08-13

PREAI

David I. Serrano-Garcia; Noel-Ivan Toto-Arellano; Geliztle-Alejandra Parra-Escamilla; Amalia Martínez García; Gustavo Rodríguez-Zurita; Yukitoshi Otani

Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain

Journal of Modern Optics

IF0

1995-02-01

PREAI

Peter de Groot; Leslie Deck

Passive vibration compensation in scanning white-light interferometry

Applied Optics

IF0

2016-08-02

PREAI

Stanislav Tereschenko; Peter Lehmann; Lisa Zellmer; Angelika Brueckner-Foit

Scanning error detection and compensation algorithm for white-light interferometry

OPTICS AND LASERS IN ENGINEERING

IF3.7

2022-01-01

PREAI

Cui, Kaihua; Liu, Qian; Huang, Xiaojin; Zhang, Hui; Li, Lulu

Iteratively correcting algorithm for suppressing temporal variations in phase-shifting interferometry

OPTICS AND LASERS IN ENGINEERING

IF3.7

2025-01-01

PREAI

Ordones, Sotero; Flores, Jorge L.; Su, Rong

Review of surface profile measurement techniques based on optical interferometry 基于光学干涉法的表面轮廓测量技术综述

OPTICS AND LASERS IN ENGINEERING

IF3.7

2017-06-01

PREAI

Wang, Yunzhi; Xie, Fang; Ma, Sen; Dong, Lianlian

查看更多内容